3/25/2010	12:02:28 AM	Helium valve closed
3/25/2010	12:02:28 AM	H2 valve closed
3/25/2010	12:02:28 AM	BCl3 valve closed
3/25/2010	12:02:28 AM	PH3 valve closed
3/25/2010	12:02:28 AM	SiCl4 pre valve closed
3/25/2010	12:02:28 AM	SiCl4 post valve closed
3/25/2010	12:02:28 AM	Main Vac valve closed
3/25/2010	12:02:28 AM	Bypass valve closed
3/25/2010	12:02:28 AM	Bubbler valve closed
3/25/2010	12:02:28 AM	Helium MFC set to  0.000000
3/25/2010	12:02:28 AM	H2 MFC set to  0.000000
3/25/2010	12:02:28 AM	BCl3 MFC set to  0.000000
3/25/2010	12:02:28 AM	SiCl4 MFC set to  0.000000
3/25/2010	12:02:28 AM	Bypass solenoid MFC set to  0.000000
3/25/2010	12:02:28 AM	Tube furnace set to 0
3/25/2010	12:02:28 AM	Run finished at 12:02 AM
3/25/2010	12:13:06 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/25/2010	12:13:06 AM	Recipe started at 12:13 AM
3/25/2010	12:13:06 AM	Helium valve closed
3/25/2010	12:13:06 AM	H2 valve closed
3/25/2010	12:13:06 AM	BCl3 valve closed
3/25/2010	12:13:06 AM	PH3 valve closed
3/25/2010	12:13:06 AM	SiCl4 pre valve closed
3/25/2010	12:13:06 AM	SiCl4 post valve closed
3/25/2010	12:13:06 AM	Main Vac valve closed
3/25/2010	12:13:06 AM	Bubbler valve closed
3/25/2010	12:13:06 AM	Bypass valve opened
3/25/2010	12:13:06 AM	Helium MFC set to  0.000000
3/25/2010	12:13:06 AM	H2 MFC set to  0.000000
3/25/2010	12:13:06 AM	BCl3 MFC set to  0.000000
3/25/2010	12:13:06 AM	SiCl4 MFC set to  0.000000
3/25/2010	12:13:06 AM	Bypass solenoid MFC set to  0.000000
3/25/2010	12:13:06 AM	Tube furnace set to 0
3/25/2010	12:13:38 AM	Helium valve closed
3/25/2010	12:13:38 AM	H2 valve closed
3/25/2010	12:13:38 AM	BCl3 valve closed
3/25/2010	12:13:38 AM	PH3 valve closed
3/25/2010	12:13:38 AM	SiCl4 pre valve closed
3/25/2010	12:13:38 AM	SiCl4 post valve closed
3/25/2010	12:13:38 AM	Bubbler valve closed
3/25/2010	12:13:38 AM	Main Vac valve opened
3/25/2010	12:13:38 AM	Bypass valve opened
3/25/2010	12:13:38 AM	Helium MFC set to  0.000000
3/25/2010	12:13:38 AM	H2 MFC set to  0.000000
3/25/2010	12:13:38 AM	BCl3 MFC set to  0.000000
3/25/2010	12:13:38 AM	SiCl4 MFC set to  0.000000
3/25/2010	12:13:38 AM	Bypass solenoid MFC set to  0.000000
3/25/2010	12:13:38 AM	Tube furnace set to 0
3/25/2010	12:13:39 AM	Run finished at 12:13 AM
3/25/2010	12:13:39 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/25/2010	12:13:56 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/25/2010	12:14:02 AM	Recipe started at 12:13 AM
3/25/2010	12:14:02 AM	H2 valve closed
3/25/2010	12:14:02 AM	BCl3 valve closed
3/25/2010	12:14:02 AM	PH3 valve closed
3/25/2010	12:14:02 AM	SiCl4 pre valve closed
3/25/2010	12:14:02 AM	SiCl4 post valve closed
3/25/2010	12:14:02 AM	Main Vac valve closed
3/25/2010	12:14:02 AM	Bypass valve closed
3/25/2010	12:14:02 AM	Bubbler valve closed
3/25/2010	12:14:02 AM	Helium valve opened
3/25/2010	12:14:02 AM	Helium MFC set to  500.000000
3/25/2010	12:14:02 AM	H2 MFC set to  0.000000
3/25/2010	12:14:02 AM	BCl3 MFC set to  0.000000
3/25/2010	12:14:02 AM	SiCl4 MFC set to  0.000000
3/25/2010	12:14:02 AM	Bypass solenoid MFC set to  0.000000
3/25/2010	12:14:02 AM	Tube furnace set to 0
3/25/2010	12:15:21 AM	Helium valve closed
3/25/2010	12:15:21 AM	H2 valve closed
3/25/2010	12:15:21 AM	BCl3 valve closed
3/25/2010	12:15:21 AM	PH3 valve closed
3/25/2010	12:15:21 AM	SiCl4 pre valve closed
3/25/2010	12:15:21 AM	SiCl4 post valve closed
3/25/2010	12:15:21 AM	Main Vac valve closed
3/25/2010	12:15:21 AM	Bypass valve closed
3/25/2010	12:15:21 AM	Bubbler valve closed
3/25/2010	12:15:21 AM	Helium MFC set to  0.000000
3/25/2010	12:15:21 AM	H2 MFC set to  0.000000
3/25/2010	12:15:21 AM	BCl3 MFC set to  0.000000
3/25/2010	12:15:21 AM	SiCl4 MFC set to  0.000000
3/25/2010	12:15:21 AM	Bypass solenoid MFC set to  0.000000
3/25/2010	12:15:21 AM	Tube furnace set to 0
3/25/2010	12:15:36 AM	Helium valve closed
3/25/2010	12:15:36 AM	H2 valve closed
3/25/2010	12:15:36 AM	BCl3 valve closed
3/25/2010	12:15:36 AM	PH3 valve closed
3/25/2010	12:15:36 AM	SiCl4 pre valve closed
3/25/2010	12:15:36 AM	SiCl4 post valve closed
3/25/2010	12:15:36 AM	Main Vac valve closed
3/25/2010	12:15:36 AM	Bubbler valve closed
3/25/2010	12:15:36 AM	Bypass valve opened
3/25/2010	12:15:36 AM	Helium MFC set to  0.000000
3/25/2010	12:15:36 AM	H2 MFC set to  0.000000
3/25/2010	12:15:36 AM	BCl3 MFC set to  0.000000
3/25/2010	12:15:36 AM	SiCl4 MFC set to  0.000000
3/25/2010	12:15:36 AM	Bypass solenoid MFC set to  0.000000
3/25/2010	12:15:36 AM	Tube furnace set to 0
3/25/2010	12:15:59 AM	Helium valve closed
3/25/2010	12:15:59 AM	H2 valve closed
3/25/2010	12:15:59 AM	BCl3 valve closed
3/25/2010	12:15:59 AM	PH3 valve closed
3/25/2010	12:15:59 AM	SiCl4 pre valve closed
3/25/2010	12:15:59 AM	SiCl4 post valve closed
3/25/2010	12:15:59 AM	Bubbler valve closed
3/25/2010	12:15:59 AM	Main Vac valve opened
3/25/2010	12:15:59 AM	Bypass valve opened
3/25/2010	12:15:59 AM	Helium MFC set to  0.000000
3/25/2010	12:15:59 AM	H2 MFC set to  0.000000
3/25/2010	12:15:59 AM	BCl3 MFC set to  0.000000
3/25/2010	12:15:59 AM	SiCl4 MFC set to  0.000000
3/25/2010	12:15:59 AM	Bypass solenoid MFC set to  0.000000
3/25/2010	12:15:59 AM	Tube furnace set to 0
3/25/2010	12:20:59 AM	H2 valve closed
3/25/2010	12:20:59 AM	BCl3 valve closed
3/25/2010	12:20:59 AM	PH3 valve closed
3/25/2010	12:20:59 AM	SiCl4 pre valve closed
3/25/2010	12:20:59 AM	SiCl4 post valve closed
3/25/2010	12:20:59 AM	Main Vac valve closed
3/25/2010	12:20:59 AM	Bypass valve closed
3/25/2010	12:20:59 AM	Bubbler valve closed
3/25/2010	12:20:59 AM	Helium valve opened
3/25/2010	12:20:59 AM	Helium MFC set to  500.000000
3/25/2010	12:20:59 AM	H2 MFC set to  0.000000
3/25/2010	12:20:59 AM	BCl3 MFC set to  0.000000
3/25/2010	12:20:59 AM	SiCl4 MFC set to  0.000000
3/25/2010	12:20:59 AM	Bypass solenoid MFC set to  0.000000
3/25/2010	12:20:59 AM	Tube furnace set to 0
3/25/2010	12:22:17 AM	Helium valve closed
3/25/2010	12:22:17 AM	H2 valve closed
3/25/2010	12:22:17 AM	BCl3 valve closed
3/25/2010	12:22:17 AM	PH3 valve closed
3/25/2010	12:22:17 AM	SiCl4 pre valve closed
3/25/2010	12:22:17 AM	SiCl4 post valve closed
3/25/2010	12:22:17 AM	Main Vac valve closed
3/25/2010	12:22:17 AM	Bypass valve closed
3/25/2010	12:22:17 AM	Bubbler valve closed
3/25/2010	12:22:17 AM	Helium MFC set to  0.000000
3/25/2010	12:22:17 AM	H2 MFC set to  0.000000
3/25/2010	12:22:17 AM	BCl3 MFC set to  0.000000
3/25/2010	12:22:17 AM	SiCl4 MFC set to  0.000000
3/25/2010	12:22:17 AM	Bypass solenoid MFC set to  0.000000
3/25/2010	12:22:17 AM	Tube furnace set to 0
3/25/2010	12:22:33 AM	Helium valve closed
3/25/2010	12:22:33 AM	H2 valve closed
3/25/2010	12:22:33 AM	BCl3 valve closed
3/25/2010	12:22:33 AM	PH3 valve closed
3/25/2010	12:22:33 AM	SiCl4 pre valve closed
3/25/2010	12:22:33 AM	SiCl4 post valve closed
3/25/2010	12:22:33 AM	Main Vac valve closed
3/25/2010	12:22:33 AM	Bubbler valve closed
3/25/2010	12:22:33 AM	Bypass valve opened
3/25/2010	12:22:33 AM	Helium MFC set to  0.000000
3/25/2010	12:22:33 AM	H2 MFC set to  0.000000
3/25/2010	12:22:33 AM	BCl3 MFC set to  0.000000
3/25/2010	12:22:33 AM	SiCl4 MFC set to  0.000000
3/25/2010	12:22:33 AM	Bypass solenoid MFC set to  0.000000
3/25/2010	12:22:33 AM	Tube furnace set to 0
3/25/2010	12:22:54 AM	Helium valve closed
3/25/2010	12:22:54 AM	H2 valve closed
3/25/2010	12:22:54 AM	BCl3 valve closed
3/25/2010	12:22:54 AM	PH3 valve closed
3/25/2010	12:22:54 AM	SiCl4 pre valve closed
3/25/2010	12:22:54 AM	SiCl4 post valve closed
3/25/2010	12:22:54 AM	Bubbler valve closed
3/25/2010	12:22:54 AM	Main Vac valve opened
3/25/2010	12:22:54 AM	Bypass valve opened
3/25/2010	12:22:54 AM	Helium MFC set to  0.000000
3/25/2010	12:22:54 AM	H2 MFC set to  0.000000
3/25/2010	12:22:54 AM	BCl3 MFC set to  0.000000
3/25/2010	12:22:54 AM	SiCl4 MFC set to  0.000000
3/25/2010	12:22:54 AM	Bypass solenoid MFC set to  0.000000
3/25/2010	12:22:54 AM	Tube furnace set to 0
3/25/2010	12:27:55 AM	H2 valve closed
3/25/2010	12:27:55 AM	BCl3 valve closed
3/25/2010	12:27:55 AM	PH3 valve closed
3/25/2010	12:27:55 AM	SiCl4 pre valve closed
3/25/2010	12:27:55 AM	SiCl4 post valve closed
3/25/2010	12:27:55 AM	Main Vac valve closed
3/25/2010	12:27:55 AM	Bypass valve closed
3/25/2010	12:27:55 AM	Bubbler valve closed
3/25/2010	12:27:55 AM	Helium valve opened
3/25/2010	12:27:55 AM	Helium MFC set to  500.000000
3/25/2010	12:27:55 AM	H2 MFC set to  0.000000
3/25/2010	12:27:55 AM	BCl3 MFC set to  0.000000
3/25/2010	12:27:55 AM	SiCl4 MFC set to  0.000000
3/25/2010	12:27:55 AM	Bypass solenoid MFC set to  0.000000
3/25/2010	12:27:55 AM	Tube furnace set to 0
3/25/2010	12:29:13 AM	Helium valve closed
3/25/2010	12:29:13 AM	H2 valve closed
3/25/2010	12:29:13 AM	BCl3 valve closed
3/25/2010	12:29:13 AM	PH3 valve closed
3/25/2010	12:29:13 AM	SiCl4 pre valve closed
3/25/2010	12:29:13 AM	SiCl4 post valve closed
3/25/2010	12:29:13 AM	Main Vac valve closed
3/25/2010	12:29:13 AM	Bypass valve closed
3/25/2010	12:29:13 AM	Bubbler valve closed
3/25/2010	12:29:13 AM	Helium MFC set to  0.000000
3/25/2010	12:29:13 AM	H2 MFC set to  0.000000
3/25/2010	12:29:13 AM	BCl3 MFC set to  0.000000
3/25/2010	12:29:13 AM	SiCl4 MFC set to  0.000000
3/25/2010	12:29:13 AM	Bypass solenoid MFC set to  0.000000
3/25/2010	12:29:13 AM	Tube furnace set to 0
3/25/2010	12:29:28 AM	Helium valve closed
3/25/2010	12:29:28 AM	H2 valve closed
3/25/2010	12:29:28 AM	BCl3 valve closed
3/25/2010	12:29:28 AM	PH3 valve closed
3/25/2010	12:29:28 AM	SiCl4 pre valve closed
3/25/2010	12:29:28 AM	SiCl4 post valve closed
3/25/2010	12:29:28 AM	Main Vac valve closed
3/25/2010	12:29:28 AM	Bubbler valve closed
3/25/2010	12:29:28 AM	Bypass valve opened
3/25/2010	12:29:28 AM	Helium MFC set to  0.000000
3/25/2010	12:29:28 AM	H2 MFC set to  0.000000
3/25/2010	12:29:28 AM	BCl3 MFC set to  0.000000
3/25/2010	12:29:28 AM	SiCl4 MFC set to  0.000000
3/25/2010	12:29:28 AM	Bypass solenoid MFC set to  0.000000
3/25/2010	12:29:28 AM	Tube furnace set to 0
3/25/2010	12:29:50 AM	Helium valve closed
3/25/2010	12:29:50 AM	H2 valve closed
3/25/2010	12:29:50 AM	BCl3 valve closed
3/25/2010	12:29:50 AM	PH3 valve closed
3/25/2010	12:29:50 AM	SiCl4 pre valve closed
3/25/2010	12:29:50 AM	SiCl4 post valve closed
3/25/2010	12:29:50 AM	Bubbler valve closed
3/25/2010	12:29:50 AM	Main Vac valve opened
3/25/2010	12:29:50 AM	Bypass valve opened
3/25/2010	12:29:50 AM	Helium MFC set to  0.000000
3/25/2010	12:29:50 AM	H2 MFC set to  0.000000
3/25/2010	12:29:50 AM	BCl3 MFC set to  0.000000
3/25/2010	12:29:50 AM	SiCl4 MFC set to  0.000000
3/25/2010	12:29:50 AM	Bypass solenoid MFC set to  0.000000
3/25/2010	12:29:50 AM	Tube furnace set to 0
3/25/2010	12:34:50 AM	Helium valve closed
3/25/2010	12:34:50 AM	H2 valve closed
3/25/2010	12:34:50 AM	BCl3 valve closed
3/25/2010	12:34:50 AM	PH3 valve closed
3/25/2010	12:34:50 AM	SiCl4 pre valve closed
3/25/2010	12:34:50 AM	SiCl4 post valve closed
3/25/2010	12:34:50 AM	Bubbler valve closed
3/25/2010	12:34:50 AM	Main Vac valve opened
3/25/2010	12:34:50 AM	Bypass valve opened
3/25/2010	12:34:50 AM	Helium MFC set to  0.000000
3/25/2010	12:34:50 AM	H2 MFC set to  0.000000
3/25/2010	12:34:50 AM	BCl3 MFC set to  0.000000
3/25/2010	12:34:50 AM	SiCl4 MFC set to  0.000000
3/25/2010	12:34:50 AM	Bypass solenoid MFC set to  0.000000
3/25/2010	12:34:50 AM	Tube furnace set to 0
3/25/2010	12:34:51 AM	Run finished at 12:34 AM
3/25/2010	12:34:51 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/25/2010	12:43:59 AM	Bypass valve closed
3/25/2010	12:44:00 AM	Main Vac valve closed
3/25/2010	12:44:23 AM	Recipe started at 12:44 AM
3/25/2010	12:44:23 AM	Helium valve closed
3/25/2010	12:44:23 AM	BCl3 valve closed
3/25/2010	12:44:23 AM	PH3 valve closed
3/25/2010	12:44:23 AM	SiCl4 pre valve closed
3/25/2010	12:44:23 AM	SiCl4 post valve closed
3/25/2010	12:44:23 AM	Main Vac valve closed
3/25/2010	12:44:23 AM	Bypass valve closed
3/25/2010	12:44:23 AM	Bubbler valve closed
3/25/2010	12:44:23 AM	H2 valve opened
3/25/2010	12:44:23 AM	Helium MFC set to  0.000000
3/25/2010	12:44:23 AM	H2 MFC set to  500.000000
3/25/2010	12:44:23 AM	BCl3 MFC set to  0.000000
3/25/2010	12:44:23 AM	SiCl4 MFC set to  0.000000
3/25/2010	12:44:23 AM	Bypass solenoid MFC set to  0.000000
3/25/2010	12:44:23 AM	Tube furnace set to 0
3/25/2010	12:45:40 AM	Helium valve closed
3/25/2010	12:45:40 AM	BCl3 valve closed
3/25/2010	12:45:40 AM	PH3 valve closed
3/25/2010	12:45:40 AM	SiCl4 pre valve closed
3/25/2010	12:45:40 AM	SiCl4 post valve closed
3/25/2010	12:45:40 AM	Main Vac valve closed
3/25/2010	12:45:40 AM	Bypass valve closed
3/25/2010	12:45:40 AM	H2 valve opened
3/25/2010	12:45:40 AM	Bubbler valve opened
3/25/2010	12:45:40 AM	Helium MFC set to  0.000000
3/25/2010	12:45:40 AM	H2 MFC set to  500.000000
3/25/2010	12:45:40 AM	BCl3 MFC set to  0.000000
3/25/2010	12:45:40 AM	SiCl4 MFC set to  0.000000
3/25/2010	12:45:40 AM	Bypass solenoid MFC set to  0.000000
3/25/2010	12:45:40 AM	Tube furnace set to 0
3/25/2010	1:05:40 AM	Helium valve closed
3/25/2010	1:05:40 AM	PH3 valve closed
3/25/2010	1:05:40 AM	Main Vac valve closed
3/25/2010	1:05:40 AM	Bypass valve closed
3/25/2010	1:05:40 AM	H2 valve opened
3/25/2010	1:05:40 AM	BCl3 valve opened
3/25/2010	1:05:40 AM	SiCl4 pre valve opened
3/25/2010	1:05:40 AM	SiCl4 post valve opened
3/25/2010	1:05:40 AM	Bubbler valve opened
3/25/2010	1:05:40 AM	Helium MFC set to  0.000000
3/25/2010	1:05:40 AM	H2 MFC set to  500.000000
3/25/2010	1:05:40 AM	BCl3 MFC set to  35.000000
3/25/2010	1:05:40 AM	SiCl4 MFC set to  325.000000
3/25/2010	1:05:40 AM	Bypass solenoid MFC set to  0.000000
3/25/2010	1:05:40 AM	Tube furnace set to 0
3/25/2010	1:20:40 AM	H2 valve closed
3/25/2010	1:20:40 AM	BCl3 valve closed
3/25/2010	1:20:40 AM	PH3 valve closed
3/25/2010	1:20:40 AM	SiCl4 pre valve closed
3/25/2010	1:20:40 AM	SiCl4 post valve closed
3/25/2010	1:20:40 AM	Main Vac valve closed
3/25/2010	1:20:40 AM	Bypass valve closed
3/25/2010	1:20:40 AM	Helium valve opened
3/25/2010	1:20:40 AM	Bubbler valve opened
3/25/2010	1:20:40 AM	Helium MFC set to  500.000000
3/25/2010	1:20:40 AM	H2 MFC set to  0.000000
3/25/2010	1:20:40 AM	BCl3 MFC set to  0.000000
3/25/2010	1:20:40 AM	SiCl4 MFC set to  0.000000
3/25/2010	1:20:40 AM	Bypass solenoid MFC set to  0.000000
3/25/2010	1:20:40 AM	Tube furnace set to 0
3/25/2010	1:40:40 AM	H2 valve closed
3/25/2010	1:40:40 AM	BCl3 valve closed
3/25/2010	1:40:40 AM	PH3 valve closed
3/25/2010	1:40:40 AM	SiCl4 pre valve closed
3/25/2010	1:40:40 AM	SiCl4 post valve closed
3/25/2010	1:40:40 AM	Main Vac valve closed
3/25/2010	1:40:40 AM	Bypass valve closed
3/25/2010	1:40:40 AM	Helium valve opened
3/25/2010	1:40:40 AM	Bubbler valve opened
3/25/2010	1:40:40 AM	Helium MFC set to  500.000000
3/25/2010	1:40:40 AM	H2 MFC set to  0.000000
3/25/2010	1:40:40 AM	BCl3 MFC set to  0.000000
3/25/2010	1:40:40 AM	SiCl4 MFC set to  0.000000
3/25/2010	1:40:40 AM	Bypass solenoid MFC set to  0.000000
3/25/2010	1:40:40 AM	Tube furnace set to 0
3/25/2010	2:00:41 AM	Helium valve closed
3/25/2010	2:00:41 AM	H2 valve closed
3/25/2010	2:00:41 AM	BCl3 valve closed
3/25/2010	2:00:41 AM	PH3 valve closed
3/25/2010	2:00:41 AM	SiCl4 pre valve closed
3/25/2010	2:00:41 AM	SiCl4 post valve closed
3/25/2010	2:00:41 AM	Main Vac valve closed
3/25/2010	2:00:41 AM	Bypass valve closed
3/25/2010	2:00:41 AM	Bubbler valve closed
3/25/2010	2:00:41 AM	Helium MFC set to  0.000000
3/25/2010	2:00:41 AM	H2 MFC set to  0.000000
3/25/2010	2:00:41 AM	BCl3 MFC set to  0.000000
3/25/2010	2:00:41 AM	SiCl4 MFC set to  0.000000
3/25/2010	2:00:41 AM	Bypass solenoid MFC set to  0.000000
3/25/2010	2:00:41 AM	Tube furnace set to 0
3/25/2010	2:00:41 AM	Run finished at 2:00 AM
3/25/2010	2:09:38 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/25/2010	2:09:38 AM	Recipe started at 2:09 AM
3/25/2010	2:09:38 AM	Helium valve closed
3/25/2010	2:09:38 AM	H2 valve closed
3/25/2010	2:09:38 AM	BCl3 valve closed
3/25/2010	2:09:38 AM	PH3 valve closed
3/25/2010	2:09:38 AM	SiCl4 pre valve closed
3/25/2010	2:09:38 AM	SiCl4 post valve closed
3/25/2010	2:09:38 AM	Main Vac valve closed
3/25/2010	2:09:38 AM	Bubbler valve closed
3/25/2010	2:09:38 AM	Bypass valve opened
3/25/2010	2:09:38 AM	Helium MFC set to  0.000000
3/25/2010	2:09:38 AM	H2 MFC set to  0.000000
3/25/2010	2:09:38 AM	BCl3 MFC set to  0.000000
3/25/2010	2:09:38 AM	SiCl4 MFC set to  0.000000
3/25/2010	2:09:38 AM	Bypass solenoid MFC set to  0.000000
3/25/2010	2:09:38 AM	Tube furnace set to 0
3/25/2010	2:10:22 AM	Helium valve closed
3/25/2010	2:10:22 AM	H2 valve closed
3/25/2010	2:10:22 AM	BCl3 valve closed
3/25/2010	2:10:22 AM	PH3 valve closed
3/25/2010	2:10:22 AM	SiCl4 pre valve closed
3/25/2010	2:10:22 AM	SiCl4 post valve closed
3/25/2010	2:10:22 AM	Bubbler valve closed
3/25/2010	2:10:22 AM	Main Vac valve opened
3/25/2010	2:10:22 AM	Bypass valve opened
3/25/2010	2:10:22 AM	Helium MFC set to  0.000000
3/25/2010	2:10:22 AM	H2 MFC set to  0.000000
3/25/2010	2:10:22 AM	BCl3 MFC set to  0.000000
3/25/2010	2:10:22 AM	SiCl4 MFC set to  0.000000
3/25/2010	2:10:22 AM	Bypass solenoid MFC set to  0.000000
3/25/2010	2:10:22 AM	Tube furnace set to 0
3/25/2010	2:10:22 AM	Run finished at 2:10 AM
3/25/2010	2:10:22 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/25/2010	2:10:35 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/25/2010	2:10:40 AM	Recipe started at 2:10 AM
3/25/2010	2:10:41 AM	H2 valve closed
3/25/2010	2:10:41 AM	BCl3 valve closed
3/25/2010	2:10:41 AM	PH3 valve closed
3/25/2010	2:10:41 AM	SiCl4 pre valve closed
3/25/2010	2:10:41 AM	SiCl4 post valve closed
3/25/2010	2:10:41 AM	Main Vac valve closed
3/25/2010	2:10:41 AM	Bypass valve closed
3/25/2010	2:10:41 AM	Bubbler valve closed
3/25/2010	2:10:41 AM	Helium valve opened
3/25/2010	2:10:41 AM	Helium MFC set to  500.000000
3/25/2010	2:10:41 AM	H2 MFC set to  0.000000
3/25/2010	2:10:41 AM	BCl3 MFC set to  0.000000
3/25/2010	2:10:41 AM	SiCl4 MFC set to  0.000000
3/25/2010	2:10:41 AM	Bypass solenoid MFC set to  0.000000
3/25/2010	2:10:41 AM	Tube furnace set to 0
3/25/2010	2:12:00 AM	Helium valve closed
3/25/2010	2:12:00 AM	H2 valve closed
3/25/2010	2:12:00 AM	BCl3 valve closed
3/25/2010	2:12:00 AM	PH3 valve closed
3/25/2010	2:12:00 AM	SiCl4 pre valve closed
3/25/2010	2:12:00 AM	SiCl4 post valve closed
3/25/2010	2:12:00 AM	Main Vac valve closed
3/25/2010	2:12:00 AM	Bypass valve closed
3/25/2010	2:12:00 AM	Bubbler valve closed
3/25/2010	2:12:00 AM	Helium MFC set to  0.000000
3/25/2010	2:12:00 AM	H2 MFC set to  0.000000
3/25/2010	2:12:00 AM	BCl3 MFC set to  0.000000
3/25/2010	2:12:00 AM	SiCl4 MFC set to  0.000000
3/25/2010	2:12:00 AM	Bypass solenoid MFC set to  0.000000
3/25/2010	2:12:00 AM	Tube furnace set to 0
3/25/2010	2:12:15 AM	Helium valve closed
3/25/2010	2:12:15 AM	H2 valve closed
3/25/2010	2:12:15 AM	BCl3 valve closed
3/25/2010	2:12:15 AM	PH3 valve closed
3/25/2010	2:12:15 AM	SiCl4 pre valve closed
3/25/2010	2:12:15 AM	SiCl4 post valve closed
3/25/2010	2:12:15 AM	Main Vac valve closed
3/25/2010	2:12:15 AM	Bubbler valve closed
3/25/2010	2:12:15 AM	Bypass valve opened
3/25/2010	2:12:15 AM	Helium MFC set to  0.000000
3/25/2010	2:12:15 AM	H2 MFC set to  0.000000
3/25/2010	2:12:15 AM	BCl3 MFC set to  0.000000
3/25/2010	2:12:15 AM	SiCl4 MFC set to  0.000000
3/25/2010	2:12:15 AM	Bypass solenoid MFC set to  0.000000
3/25/2010	2:12:15 AM	Tube furnace set to 0
3/25/2010	2:12:38 AM	Helium valve closed
3/25/2010	2:12:38 AM	H2 valve closed
3/25/2010	2:12:38 AM	BCl3 valve closed
3/25/2010	2:12:38 AM	PH3 valve closed
3/25/2010	2:12:38 AM	SiCl4 pre valve closed
3/25/2010	2:12:38 AM	SiCl4 post valve closed
3/25/2010	2:12:38 AM	Bubbler valve closed
3/25/2010	2:12:38 AM	Main Vac valve opened
3/25/2010	2:12:38 AM	Bypass valve opened
3/25/2010	2:12:38 AM	Helium MFC set to  0.000000
3/25/2010	2:12:38 AM	H2 MFC set to  0.000000
3/25/2010	2:12:38 AM	BCl3 MFC set to  0.000000
3/25/2010	2:12:38 AM	SiCl4 MFC set to  0.000000
3/25/2010	2:12:38 AM	Bypass solenoid MFC set to  0.000000
3/25/2010	2:12:38 AM	Tube furnace set to 0
3/25/2010	2:17:38 AM	H2 valve closed
3/25/2010	2:17:38 AM	BCl3 valve closed
3/25/2010	2:17:38 AM	PH3 valve closed
3/25/2010	2:17:38 AM	SiCl4 pre valve closed
3/25/2010	2:17:38 AM	SiCl4 post valve closed
3/25/2010	2:17:38 AM	Main Vac valve closed
3/25/2010	2:17:38 AM	Bypass valve closed
3/25/2010	2:17:38 AM	Bubbler valve closed
3/25/2010	2:17:38 AM	Helium valve opened
3/25/2010	2:17:38 AM	Helium MFC set to  500.000000
3/25/2010	2:17:38 AM	H2 MFC set to  0.000000
3/25/2010	2:17:38 AM	BCl3 MFC set to  0.000000
3/25/2010	2:17:38 AM	SiCl4 MFC set to  0.000000
3/25/2010	2:17:38 AM	Bypass solenoid MFC set to  0.000000
3/25/2010	2:17:38 AM	Tube furnace set to 0
3/25/2010	2:18:56 AM	Helium valve closed
3/25/2010	2:18:56 AM	H2 valve closed
3/25/2010	2:18:56 AM	BCl3 valve closed
3/25/2010	2:18:56 AM	PH3 valve closed
3/25/2010	2:18:56 AM	SiCl4 pre valve closed
3/25/2010	2:18:56 AM	SiCl4 post valve closed
3/25/2010	2:18:56 AM	Main Vac valve closed
3/25/2010	2:18:56 AM	Bypass valve closed
3/25/2010	2:18:56 AM	Bubbler valve closed
3/25/2010	2:18:56 AM	Helium MFC set to  0.000000
3/25/2010	2:18:57 AM	H2 MFC set to  0.000000
3/25/2010	2:18:57 AM	BCl3 MFC set to  0.000000
3/25/2010	2:18:57 AM	SiCl4 MFC set to  0.000000
3/25/2010	2:18:57 AM	Bypass solenoid MFC set to  0.000000
3/25/2010	2:18:57 AM	Tube furnace set to 0
3/25/2010	2:19:12 AM	Helium valve closed
3/25/2010	2:19:12 AM	H2 valve closed
3/25/2010	2:19:12 AM	BCl3 valve closed
3/25/2010	2:19:12 AM	PH3 valve closed
3/25/2010	2:19:12 AM	SiCl4 pre valve closed
3/25/2010	2:19:12 AM	SiCl4 post valve closed
3/25/2010	2:19:12 AM	Main Vac valve closed
3/25/2010	2:19:12 AM	Bubbler valve closed
3/25/2010	2:19:12 AM	Bypass valve opened
3/25/2010	2:19:12 AM	Helium MFC set to  0.000000
3/25/2010	2:19:12 AM	H2 MFC set to  0.000000
3/25/2010	2:19:12 AM	BCl3 MFC set to  0.000000
3/25/2010	2:19:12 AM	SiCl4 MFC set to  0.000000
3/25/2010	2:19:12 AM	Bypass solenoid MFC set to  0.000000
3/25/2010	2:19:12 AM	Tube furnace set to 0
3/25/2010	2:19:34 AM	Helium valve closed
3/25/2010	2:19:34 AM	H2 valve closed
3/25/2010	2:19:34 AM	BCl3 valve closed
3/25/2010	2:19:34 AM	PH3 valve closed
3/25/2010	2:19:34 AM	SiCl4 pre valve closed
3/25/2010	2:19:34 AM	SiCl4 post valve closed
3/25/2010	2:19:34 AM	Bubbler valve closed
3/25/2010	2:19:34 AM	Main Vac valve opened
3/25/2010	2:19:34 AM	Bypass valve opened
3/25/2010	2:19:34 AM	Helium MFC set to  0.000000
3/25/2010	2:19:34 AM	H2 MFC set to  0.000000
3/25/2010	2:19:34 AM	BCl3 MFC set to  0.000000
3/25/2010	2:19:34 AM	SiCl4 MFC set to  0.000000
3/25/2010	2:19:34 AM	Bypass solenoid MFC set to  0.000000
3/25/2010	2:19:34 AM	Tube furnace set to 0
3/25/2010	2:24:34 AM	H2 valve closed
3/25/2010	2:24:34 AM	BCl3 valve closed
3/25/2010	2:24:34 AM	PH3 valve closed
3/25/2010	2:24:34 AM	SiCl4 pre valve closed
3/25/2010	2:24:34 AM	SiCl4 post valve closed
3/25/2010	2:24:34 AM	Main Vac valve closed
3/25/2010	2:24:34 AM	Bypass valve closed
3/25/2010	2:24:34 AM	Bubbler valve closed
3/25/2010	2:24:34 AM	Helium valve opened
3/25/2010	2:24:34 AM	Helium MFC set to  500.000000
3/25/2010	2:24:34 AM	H2 MFC set to  0.000000
3/25/2010	2:24:34 AM	BCl3 MFC set to  0.000000
3/25/2010	2:24:34 AM	SiCl4 MFC set to  0.000000
3/25/2010	2:24:34 AM	Bypass solenoid MFC set to  0.000000
3/25/2010	2:24:34 AM	Tube furnace set to 0
3/25/2010	2:25:52 AM	Helium valve closed
3/25/2010	2:25:52 AM	H2 valve closed
3/25/2010	2:25:52 AM	BCl3 valve closed
3/25/2010	2:25:52 AM	PH3 valve closed
3/25/2010	2:25:52 AM	SiCl4 pre valve closed
3/25/2010	2:25:52 AM	SiCl4 post valve closed
3/25/2010	2:25:52 AM	Main Vac valve closed
3/25/2010	2:25:52 AM	Bypass valve closed
3/25/2010	2:25:52 AM	Bubbler valve closed
3/25/2010	2:25:52 AM	Helium MFC set to  0.000000
3/25/2010	2:25:52 AM	H2 MFC set to  0.000000
3/25/2010	2:25:52 AM	BCl3 MFC set to  0.000000
3/25/2010	2:25:52 AM	SiCl4 MFC set to  0.000000
3/25/2010	2:25:52 AM	Bypass solenoid MFC set to  0.000000
3/25/2010	2:25:52 AM	Tube furnace set to 0
3/25/2010	2:26:07 AM	Helium valve closed
3/25/2010	2:26:07 AM	H2 valve closed
3/25/2010	2:26:07 AM	BCl3 valve closed
3/25/2010	2:26:07 AM	PH3 valve closed
3/25/2010	2:26:07 AM	SiCl4 pre valve closed
3/25/2010	2:26:07 AM	SiCl4 post valve closed
3/25/2010	2:26:07 AM	Main Vac valve closed
3/25/2010	2:26:07 AM	Bubbler valve closed
3/25/2010	2:26:07 AM	Bypass valve opened
3/25/2010	2:26:07 AM	Helium MFC set to  0.000000
3/25/2010	2:26:07 AM	H2 MFC set to  0.000000
3/25/2010	2:26:07 AM	BCl3 MFC set to  0.000000
3/25/2010	2:26:07 AM	SiCl4 MFC set to  0.000000
3/25/2010	2:26:07 AM	Bypass solenoid MFC set to  0.000000
3/25/2010	2:26:07 AM	Tube furnace set to 0
3/25/2010	2:26:29 AM	Helium valve closed
3/25/2010	2:26:29 AM	H2 valve closed
3/25/2010	2:26:29 AM	BCl3 valve closed
3/25/2010	2:26:29 AM	PH3 valve closed
3/25/2010	2:26:29 AM	SiCl4 pre valve closed
3/25/2010	2:26:29 AM	SiCl4 post valve closed
3/25/2010	2:26:29 AM	Bubbler valve closed
3/25/2010	2:26:29 AM	Main Vac valve opened
3/25/2010	2:26:29 AM	Bypass valve opened
3/25/2010	2:26:29 AM	Helium MFC set to  0.000000
3/25/2010	2:26:29 AM	H2 MFC set to  0.000000
3/25/2010	2:26:29 AM	BCl3 MFC set to  0.000000
3/25/2010	2:26:29 AM	SiCl4 MFC set to  0.000000
3/25/2010	2:26:29 AM	Bypass solenoid MFC set to  0.000000
3/25/2010	2:26:29 AM	Tube furnace set to 0
3/25/2010	2:31:30 AM	Helium valve closed
3/25/2010	2:31:30 AM	H2 valve closed
3/25/2010	2:31:30 AM	BCl3 valve closed
3/25/2010	2:31:30 AM	PH3 valve closed
3/25/2010	2:31:30 AM	SiCl4 pre valve closed
3/25/2010	2:31:30 AM	SiCl4 post valve closed
3/25/2010	2:31:30 AM	Bubbler valve closed
3/25/2010	2:31:30 AM	Main Vac valve opened
3/25/2010	2:31:30 AM	Bypass valve opened
3/25/2010	2:31:30 AM	Helium MFC set to  0.000000
3/25/2010	2:31:30 AM	H2 MFC set to  0.000000
3/25/2010	2:31:30 AM	BCl3 MFC set to  0.000000
3/25/2010	2:31:30 AM	SiCl4 MFC set to  0.000000
3/25/2010	2:31:30 AM	Bypass solenoid MFC set to  0.000000
3/25/2010	2:31:30 AM	Tube furnace set to 0
3/25/2010	2:31:31 AM	Run finished at 2:31 AM
3/25/2010	2:31:31 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/25/2010	2:38:30 AM	Bypass valve closed
3/25/2010	2:38:31 AM	Main Vac valve closed
3/25/2010	2:38:47 AM	Bypass valve opened
3/25/2010	2:38:47 AM	Main Vac valve opened
3/25/2010	2:39:17 AM	Recipe started at 2:39 AM
3/25/2010	2:39:17 AM	Helium valve closed
3/25/2010	2:39:17 AM	BCl3 valve closed
3/25/2010	2:39:17 AM	PH3 valve closed
3/25/2010	2:39:17 AM	SiCl4 pre valve closed
3/25/2010	2:39:17 AM	SiCl4 post valve closed
3/25/2010	2:39:17 AM	Main Vac valve closed
3/25/2010	2:39:17 AM	Bypass valve closed
3/25/2010	2:39:17 AM	Bubbler valve closed
3/25/2010	2:39:17 AM	H2 valve opened
3/25/2010	2:39:17 AM	Helium MFC set to  0.000000
3/25/2010	2:39:17 AM	H2 MFC set to  500.000000
3/25/2010	2:39:17 AM	BCl3 MFC set to  0.000000
3/25/2010	2:39:17 AM	SiCl4 MFC set to  0.000000
3/25/2010	2:39:17 AM	Bypass solenoid MFC set to  0.000000
3/25/2010	2:39:17 AM	Tube furnace set to 0
3/25/2010	2:40:36 AM	Helium valve closed
3/25/2010	2:40:36 AM	BCl3 valve closed
3/25/2010	2:40:36 AM	PH3 valve closed
3/25/2010	2:40:36 AM	SiCl4 pre valve closed
3/25/2010	2:40:36 AM	SiCl4 post valve closed
3/25/2010	2:40:36 AM	Main Vac valve closed
3/25/2010	2:40:36 AM	Bypass valve closed
3/25/2010	2:40:36 AM	H2 valve opened
3/25/2010	2:40:36 AM	Bubbler valve opened
3/25/2010	2:40:36 AM	Helium MFC set to  0.000000
3/25/2010	2:40:36 AM	H2 MFC set to  500.000000
3/25/2010	2:40:36 AM	BCl3 MFC set to  0.000000
3/25/2010	2:40:36 AM	SiCl4 MFC set to  0.000000
3/25/2010	2:40:36 AM	Bypass solenoid MFC set to  0.000000
3/25/2010	2:40:36 AM	Tube furnace set to 0
3/25/2010	3:00:36 AM	Helium valve closed
3/25/2010	3:00:36 AM	PH3 valve closed
3/25/2010	3:00:36 AM	Main Vac valve closed
3/25/2010	3:00:36 AM	Bypass valve closed
3/25/2010	3:00:36 AM	H2 valve opened
3/25/2010	3:00:36 AM	BCl3 valve opened
3/25/2010	3:00:36 AM	SiCl4 pre valve opened
3/25/2010	3:00:36 AM	SiCl4 post valve opened
3/25/2010	3:00:36 AM	Bubbler valve opened
3/25/2010	3:00:36 AM	Helium MFC set to  0.000000
3/25/2010	3:00:36 AM	H2 MFC set to  500.000000
3/25/2010	3:00:36 AM	BCl3 MFC set to  35.000000
3/25/2010	3:00:36 AM	SiCl4 MFC set to  325.000000
3/25/2010	3:00:36 AM	Bypass solenoid MFC set to  0.000000
3/25/2010	3:00:36 AM	Tube furnace set to 0
3/25/2010	3:15:36 AM	H2 valve closed
3/25/2010	3:15:36 AM	BCl3 valve closed
3/25/2010	3:15:36 AM	PH3 valve closed
3/25/2010	3:15:36 AM	SiCl4 pre valve closed
3/25/2010	3:15:36 AM	SiCl4 post valve closed
3/25/2010	3:15:36 AM	Main Vac valve closed
3/25/2010	3:15:36 AM	Bypass valve closed
3/25/2010	3:15:36 AM	Helium valve opened
3/25/2010	3:15:36 AM	Bubbler valve opened
3/25/2010	3:15:36 AM	Helium MFC set to  500.000000
3/25/2010	3:15:36 AM	H2 MFC set to  0.000000
3/25/2010	3:15:36 AM	BCl3 MFC set to  0.000000
3/25/2010	3:15:36 AM	SiCl4 MFC set to  0.000000
3/25/2010	3:15:36 AM	Bypass solenoid MFC set to  0.000000
3/25/2010	3:15:36 AM	Tube furnace set to 0
3/25/2010	3:35:37 AM	H2 valve closed
3/25/2010	3:35:37 AM	BCl3 valve closed
3/25/2010	3:35:37 AM	PH3 valve closed
3/25/2010	3:35:37 AM	SiCl4 pre valve closed
3/25/2010	3:35:37 AM	SiCl4 post valve closed
3/25/2010	3:35:37 AM	Main Vac valve closed
3/25/2010	3:35:37 AM	Bypass valve closed
3/25/2010	3:35:37 AM	Helium valve opened
3/25/2010	3:35:37 AM	Bubbler valve opened
3/25/2010	3:35:37 AM	Helium MFC set to  500.000000
3/25/2010	3:35:37 AM	H2 MFC set to  0.000000
3/25/2010	3:35:37 AM	BCl3 MFC set to  0.000000
3/25/2010	3:35:37 AM	SiCl4 MFC set to  0.000000
3/25/2010	3:35:37 AM	Bypass solenoid MFC set to  0.000000
3/25/2010	3:35:37 AM	Tube furnace set to 0
3/25/2010	3:46:48 AM	Helium valve closed
3/25/2010	3:46:48 AM	H2 valve closed
3/25/2010	3:46:48 AM	BCl3 valve closed
3/25/2010	3:46:48 AM	PH3 valve closed
3/25/2010	3:46:48 AM	SiCl4 pre valve closed
3/25/2010	3:46:48 AM	SiCl4 post valve closed
3/25/2010	3:46:48 AM	Main Vac valve closed
3/25/2010	3:46:48 AM	Bypass valve closed
3/25/2010	3:46:48 AM	Bubbler valve closed
3/25/2010	3:46:48 AM	Helium MFC set to  0.000000
3/25/2010	3:46:48 AM	H2 MFC set to  0.000000
3/25/2010	3:46:48 AM	BCl3 MFC set to  0.000000
3/25/2010	3:46:48 AM	SiCl4 MFC set to  0.000000
3/25/2010	3:46:48 AM	Bypass solenoid MFC set to  0.000000
3/25/2010	3:46:48 AM	Tube furnace set to 0
3/25/2010	3:46:49 AM	Run finished at 3:46 AM
3/25/2010	3:51:29 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/25/2010	3:51:29 AM	Recipe started at 3:51 AM
3/25/2010	3:51:29 AM	Helium valve closed
3/25/2010	3:51:29 AM	H2 valve closed
3/25/2010	3:51:29 AM	BCl3 valve closed
3/25/2010	3:51:29 AM	PH3 valve closed
3/25/2010	3:51:29 AM	SiCl4 pre valve closed
3/25/2010	3:51:29 AM	SiCl4 post valve closed
3/25/2010	3:51:29 AM	Main Vac valve closed
3/25/2010	3:51:29 AM	Bubbler valve closed
3/25/2010	3:51:29 AM	Bypass valve opened
3/25/2010	3:51:29 AM	Helium MFC set to  0.000000
3/25/2010	3:51:29 AM	H2 MFC set to  0.000000
3/25/2010	3:51:29 AM	BCl3 MFC set to  0.000000
3/25/2010	3:51:29 AM	SiCl4 MFC set to  0.000000
3/25/2010	3:51:29 AM	Bypass solenoid MFC set to  0.000000
3/25/2010	3:51:29 AM	Tube furnace set to 0
3/25/2010	3:52:01 AM	Helium valve closed
3/25/2010	3:52:01 AM	H2 valve closed
3/25/2010	3:52:01 AM	BCl3 valve closed
3/25/2010	3:52:01 AM	PH3 valve closed
3/25/2010	3:52:01 AM	SiCl4 pre valve closed
3/25/2010	3:52:01 AM	SiCl4 post valve closed
3/25/2010	3:52:01 AM	Bubbler valve closed
3/25/2010	3:52:01 AM	Main Vac valve opened
3/25/2010	3:52:01 AM	Bypass valve opened
3/25/2010	3:52:01 AM	Helium MFC set to  0.000000
3/25/2010	3:52:01 AM	H2 MFC set to  0.000000
3/25/2010	3:52:01 AM	BCl3 MFC set to  0.000000
3/25/2010	3:52:01 AM	SiCl4 MFC set to  0.000000
3/25/2010	3:52:01 AM	Bypass solenoid MFC set to  0.000000
3/25/2010	3:52:01 AM	Tube furnace set to 0
3/25/2010	3:52:01 AM	Run finished at 3:52 AM
3/25/2010	3:52:01 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/25/2010	8:26:42 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/25/2010	8:26:43 AM	Recipe started at 8:26 AM
3/25/2010	8:26:43 AM	H2 valve closed
3/25/2010	8:26:43 AM	BCl3 valve closed
3/25/2010	8:26:43 AM	PH3 valve closed
3/25/2010	8:26:43 AM	SiCl4 pre valve closed
3/25/2010	8:26:43 AM	SiCl4 post valve closed
3/25/2010	8:26:43 AM	Main Vac valve closed
3/25/2010	8:26:43 AM	Bypass valve closed
3/25/2010	8:26:43 AM	Bubbler valve closed
3/25/2010	8:26:43 AM	Helium valve opened
3/25/2010	8:26:43 AM	Helium MFC set to  500.000000
3/25/2010	8:26:43 AM	H2 MFC set to  0.000000
3/25/2010	8:26:43 AM	BCl3 MFC set to  0.000000
3/25/2010	8:26:43 AM	SiCl4 MFC set to  0.000000
3/25/2010	8:26:43 AM	Bypass solenoid MFC set to  0.000000
3/25/2010	8:26:43 AM	Tube furnace set to 0
3/25/2010	8:28:02 AM	Helium valve closed
3/25/2010	8:28:02 AM	H2 valve closed
3/25/2010	8:28:02 AM	BCl3 valve closed
3/25/2010	8:28:02 AM	PH3 valve closed
3/25/2010	8:28:02 AM	SiCl4 pre valve closed
3/25/2010	8:28:02 AM	SiCl4 post valve closed
3/25/2010	8:28:02 AM	Main Vac valve closed
3/25/2010	8:28:02 AM	Bypass valve closed
3/25/2010	8:28:02 AM	Bubbler valve closed
3/25/2010	8:28:02 AM	Helium MFC set to  0.000000
3/25/2010	8:28:02 AM	H2 MFC set to  0.000000
3/25/2010	8:28:02 AM	BCl3 MFC set to  0.000000
3/25/2010	8:28:02 AM	SiCl4 MFC set to  0.000000
3/25/2010	8:28:02 AM	Bypass solenoid MFC set to  0.000000
3/25/2010	8:28:02 AM	Tube furnace set to 0
3/25/2010	8:28:03 AM	Run finished at 8:28 AM
3/25/2010	8:28:03 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/25/2010	8:31:14 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/25/2010	8:31:15 AM	Recipe started at 8:31 AM
3/25/2010	8:31:15 AM	Helium valve closed
3/25/2010	8:31:15 AM	H2 valve closed
3/25/2010	8:31:15 AM	BCl3 valve closed
3/25/2010	8:31:15 AM	PH3 valve closed
3/25/2010	8:31:15 AM	SiCl4 pre valve closed
3/25/2010	8:31:15 AM	SiCl4 post valve closed
3/25/2010	8:31:15 AM	Main Vac valve closed
3/25/2010	8:31:15 AM	Bubbler valve closed
3/25/2010	8:31:15 AM	Bypass valve opened
3/25/2010	8:31:15 AM	Helium MFC set to  0.000000
3/25/2010	8:31:15 AM	H2 MFC set to  0.000000
3/25/2010	8:31:15 AM	BCl3 MFC set to  0.000000
3/25/2010	8:31:15 AM	SiCl4 MFC set to  0.000000
3/25/2010	8:31:15 AM	Bypass solenoid MFC set to  0.000000
3/25/2010	8:31:15 AM	Tube furnace set to 0
3/25/2010	8:31:45 AM	Helium valve closed
3/25/2010	8:31:45 AM	H2 valve closed
3/25/2010	8:31:45 AM	BCl3 valve closed
3/25/2010	8:31:45 AM	PH3 valve closed
3/25/2010	8:31:45 AM	SiCl4 pre valve closed
3/25/2010	8:31:45 AM	SiCl4 post valve closed
3/25/2010	8:31:45 AM	Bubbler valve closed
3/25/2010	8:31:45 AM	Main Vac valve opened
3/25/2010	8:31:45 AM	Bypass valve opened
3/25/2010	8:31:45 AM	Helium MFC set to  0.000000
3/25/2010	8:31:45 AM	H2 MFC set to  0.000000
3/25/2010	8:31:45 AM	BCl3 MFC set to  0.000000
3/25/2010	8:31:45 AM	SiCl4 MFC set to  0.000000
3/25/2010	8:31:45 AM	Bypass solenoid MFC set to  0.000000
3/25/2010	8:31:45 AM	Tube furnace set to 0
3/25/2010	8:31:46 AM	Run finished at 8:31 AM
3/25/2010	8:31:46 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/25/2010	8:32:49 AM	Bypass valve closed
3/25/2010	8:32:49 AM	Main Vac valve closed
3/25/2010	8:32:58 AM	Bypass valve opened
3/25/2010	8:32:58 AM	Main Vac valve opened
3/25/2010	8:33:04 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/25/2010	8:33:09 AM	Recipe started at 8:33 AM
3/25/2010	8:33:09 AM	H2 valve closed
3/25/2010	8:33:09 AM	BCl3 valve closed
3/25/2010	8:33:09 AM	PH3 valve closed
3/25/2010	8:33:09 AM	SiCl4 pre valve closed
3/25/2010	8:33:09 AM	SiCl4 post valve closed
3/25/2010	8:33:09 AM	Main Vac valve closed
3/25/2010	8:33:09 AM	Bypass valve closed
3/25/2010	8:33:09 AM	Bubbler valve closed
3/25/2010	8:33:09 AM	Helium valve opened
3/25/2010	8:33:09 AM	Helium MFC set to  500.000000
3/25/2010	8:33:09 AM	H2 MFC set to  0.000000
3/25/2010	8:33:09 AM	BCl3 MFC set to  0.000000
3/25/2010	8:33:09 AM	SiCl4 MFC set to  0.000000
3/25/2010	8:33:09 AM	Bypass solenoid MFC set to  0.000000
3/25/2010	8:33:09 AM	Tube furnace set to 0
3/25/2010	8:34:31 AM	Helium valve closed
3/25/2010	8:34:31 AM	H2 valve closed
3/25/2010	8:34:31 AM	BCl3 valve closed
3/25/2010	8:34:31 AM	PH3 valve closed
3/25/2010	8:34:31 AM	SiCl4 pre valve closed
3/25/2010	8:34:31 AM	SiCl4 post valve closed
3/25/2010	8:34:32 AM	Main Vac valve closed
3/25/2010	8:34:32 AM	Bypass valve closed
3/25/2010	8:34:32 AM	Bubbler valve closed
3/25/2010	8:34:32 AM	Helium MFC set to  0.000000
3/25/2010	8:34:32 AM	H2 MFC set to  0.000000
3/25/2010	8:34:32 AM	BCl3 MFC set to  0.000000
3/25/2010	8:34:32 AM	SiCl4 MFC set to  0.000000
3/25/2010	8:34:32 AM	Bypass solenoid MFC set to  0.000000
3/25/2010	8:34:32 AM	Tube furnace set to 0
3/25/2010	8:34:47 AM	Helium valve closed
3/25/2010	8:34:47 AM	H2 valve closed
3/25/2010	8:34:47 AM	BCl3 valve closed
3/25/2010	8:34:47 AM	PH3 valve closed
3/25/2010	8:34:47 AM	SiCl4 pre valve closed
3/25/2010	8:34:47 AM	SiCl4 post valve closed
3/25/2010	8:34:47 AM	Main Vac valve closed
3/25/2010	8:34:47 AM	Bubbler valve closed
3/25/2010	8:34:47 AM	Bypass valve opened
3/25/2010	8:34:47 AM	Helium MFC set to  0.000000
3/25/2010	8:34:47 AM	H2 MFC set to  0.000000
3/25/2010	8:34:47 AM	BCl3 MFC set to  0.000000
3/25/2010	8:34:47 AM	SiCl4 MFC set to  0.000000
3/25/2010	8:34:47 AM	Bypass solenoid MFC set to  0.000000
3/25/2010	8:34:47 AM	Tube furnace set to 0
3/25/2010	8:35:10 AM	Helium valve closed
3/25/2010	8:35:10 AM	H2 valve closed
3/25/2010	8:35:10 AM	BCl3 valve closed
3/25/2010	8:35:10 AM	PH3 valve closed
3/25/2010	8:35:10 AM	SiCl4 pre valve closed
3/25/2010	8:35:10 AM	SiCl4 post valve closed
3/25/2010	8:35:10 AM	Bubbler valve closed
3/25/2010	8:35:10 AM	Main Vac valve opened
3/25/2010	8:35:10 AM	Bypass valve opened
3/25/2010	8:35:10 AM	Helium MFC set to  0.000000
3/25/2010	8:35:10 AM	H2 MFC set to  0.000000
3/25/2010	8:35:10 AM	BCl3 MFC set to  0.000000
3/25/2010	8:35:10 AM	SiCl4 MFC set to  0.000000
3/25/2010	8:35:10 AM	Bypass solenoid MFC set to  0.000000
3/25/2010	8:35:10 AM	Tube furnace set to 0
3/25/2010	8:40:10 AM	H2 valve closed
3/25/2010	8:40:10 AM	BCl3 valve closed
3/25/2010	8:40:10 AM	PH3 valve closed
3/25/2010	8:40:10 AM	SiCl4 pre valve closed
3/25/2010	8:40:10 AM	SiCl4 post valve closed
3/25/2010	8:40:10 AM	Main Vac valve closed
3/25/2010	8:40:10 AM	Bypass valve closed
3/25/2010	8:40:10 AM	Bubbler valve closed
3/25/2010	8:40:10 AM	Helium valve opened
3/25/2010	8:40:10 AM	Helium MFC set to  500.000000
3/25/2010	8:40:10 AM	H2 MFC set to  0.000000
3/25/2010	8:40:10 AM	BCl3 MFC set to  0.000000
3/25/2010	8:40:10 AM	SiCl4 MFC set to  0.000000
3/25/2010	8:40:10 AM	Bypass solenoid MFC set to  0.000000
3/25/2010	8:40:10 AM	Tube furnace set to 0
3/25/2010	8:41:32 AM	Helium valve closed
3/25/2010	8:41:32 AM	H2 valve closed
3/25/2010	8:41:32 AM	BCl3 valve closed
3/25/2010	8:41:32 AM	PH3 valve closed
3/25/2010	8:41:32 AM	SiCl4 pre valve closed
3/25/2010	8:41:32 AM	SiCl4 post valve closed
3/25/2010	8:41:32 AM	Main Vac valve closed
3/25/2010	8:41:32 AM	Bypass valve closed
3/25/2010	8:41:32 AM	Bubbler valve closed
3/25/2010	8:41:32 AM	Helium MFC set to  0.000000
3/25/2010	8:41:32 AM	H2 MFC set to  0.000000
3/25/2010	8:41:32 AM	BCl3 MFC set to  0.000000
3/25/2010	8:41:32 AM	SiCl4 MFC set to  0.000000
3/25/2010	8:41:32 AM	Bypass solenoid MFC set to  0.000000
3/25/2010	8:41:32 AM	Tube furnace set to 0
3/25/2010	8:41:47 AM	Helium valve closed
3/25/2010	8:41:47 AM	H2 valve closed
3/25/2010	8:41:47 AM	BCl3 valve closed
3/25/2010	8:41:47 AM	PH3 valve closed
3/25/2010	8:41:47 AM	SiCl4 pre valve closed
3/25/2010	8:41:47 AM	SiCl4 post valve closed
3/25/2010	8:41:47 AM	Main Vac valve closed
3/25/2010	8:41:47 AM	Bubbler valve closed
3/25/2010	8:41:47 AM	Bypass valve opened
3/25/2010	8:41:47 AM	Helium MFC set to  0.000000
3/25/2010	8:41:47 AM	H2 MFC set to  0.000000
3/25/2010	8:41:47 AM	BCl3 MFC set to  0.000000
3/25/2010	8:41:47 AM	SiCl4 MFC set to  0.000000
3/25/2010	8:41:47 AM	Bypass solenoid MFC set to  0.000000
3/25/2010	8:41:47 AM	Tube furnace set to 0
3/25/2010	8:42:10 AM	Helium valve closed
3/25/2010	8:42:10 AM	H2 valve closed
3/25/2010	8:42:10 AM	BCl3 valve closed
3/25/2010	8:42:10 AM	PH3 valve closed
3/25/2010	8:42:10 AM	SiCl4 pre valve closed
3/25/2010	8:42:10 AM	SiCl4 post valve closed
3/25/2010	8:42:10 AM	Bubbler valve closed
3/25/2010	8:42:10 AM	Main Vac valve opened
3/25/2010	8:42:10 AM	Bypass valve opened
3/25/2010	8:42:10 AM	Helium MFC set to  0.000000
3/25/2010	8:42:10 AM	H2 MFC set to  0.000000
3/25/2010	8:42:10 AM	BCl3 MFC set to  0.000000
3/25/2010	8:42:10 AM	SiCl4 MFC set to  0.000000
3/25/2010	8:42:10 AM	Bypass solenoid MFC set to  0.000000
3/25/2010	8:42:10 AM	Tube furnace set to 0
3/25/2010	8:47:10 AM	H2 valve closed
3/25/2010	8:47:10 AM	BCl3 valve closed
3/25/2010	8:47:10 AM	PH3 valve closed
3/25/2010	8:47:10 AM	SiCl4 pre valve closed
3/25/2010	8:47:10 AM	SiCl4 post valve closed
3/25/2010	8:47:10 AM	Main Vac valve closed
3/25/2010	8:47:10 AM	Bypass valve closed
3/25/2010	8:47:10 AM	Bubbler valve closed
3/25/2010	8:47:10 AM	Helium valve opened
3/25/2010	8:47:10 AM	Helium MFC set to  500.000000
3/25/2010	8:47:10 AM	H2 MFC set to  0.000000
3/25/2010	8:47:10 AM	BCl3 MFC set to  0.000000
3/25/2010	8:47:10 AM	SiCl4 MFC set to  0.000000
3/25/2010	8:47:10 AM	Bypass solenoid MFC set to  0.000000
3/25/2010	8:47:10 AM	Tube furnace set to 0
3/25/2010	8:48:32 AM	Helium valve closed
3/25/2010	8:48:32 AM	H2 valve closed
3/25/2010	8:48:32 AM	BCl3 valve closed
3/25/2010	8:48:32 AM	PH3 valve closed
3/25/2010	8:48:32 AM	SiCl4 pre valve closed
3/25/2010	8:48:32 AM	SiCl4 post valve closed
3/25/2010	8:48:32 AM	Main Vac valve closed
3/25/2010	8:48:32 AM	Bypass valve closed
3/25/2010	8:48:32 AM	Bubbler valve closed
3/25/2010	8:48:32 AM	Helium MFC set to  0.000000
3/25/2010	8:48:32 AM	H2 MFC set to  0.000000
3/25/2010	8:48:32 AM	BCl3 MFC set to  0.000000
3/25/2010	8:48:32 AM	SiCl4 MFC set to  0.000000
3/25/2010	8:48:32 AM	Bypass solenoid MFC set to  0.000000
3/25/2010	8:48:32 AM	Tube furnace set to 0
3/25/2010	8:48:48 AM	Helium valve closed
3/25/2010	8:48:48 AM	H2 valve closed
3/25/2010	8:48:48 AM	BCl3 valve closed
3/25/2010	8:48:48 AM	PH3 valve closed
3/25/2010	8:48:48 AM	SiCl4 pre valve closed
3/25/2010	8:48:48 AM	SiCl4 post valve closed
3/25/2010	8:48:48 AM	Main Vac valve closed
3/25/2010	8:48:48 AM	Bubbler valve closed
3/25/2010	8:48:48 AM	Bypass valve opened
3/25/2010	8:48:48 AM	Helium MFC set to  0.000000
3/25/2010	8:48:48 AM	H2 MFC set to  0.000000
3/25/2010	8:48:48 AM	BCl3 MFC set to  0.000000
3/25/2010	8:48:48 AM	SiCl4 MFC set to  0.000000
3/25/2010	8:48:48 AM	Bypass solenoid MFC set to  0.000000
3/25/2010	8:48:48 AM	Tube furnace set to 0
3/25/2010	8:49:10 AM	Helium valve closed
3/25/2010	8:49:10 AM	H2 valve closed
3/25/2010	8:49:10 AM	BCl3 valve closed
3/25/2010	8:49:10 AM	PH3 valve closed
3/25/2010	8:49:10 AM	SiCl4 pre valve closed
3/25/2010	8:49:10 AM	SiCl4 post valve closed
3/25/2010	8:49:10 AM	Bubbler valve closed
3/25/2010	8:49:10 AM	Main Vac valve opened
3/25/2010	8:49:10 AM	Bypass valve opened
3/25/2010	8:49:10 AM	Helium MFC set to  0.000000
3/25/2010	8:49:10 AM	H2 MFC set to  0.000000
3/25/2010	8:49:10 AM	BCl3 MFC set to  0.000000
3/25/2010	8:49:10 AM	SiCl4 MFC set to  0.000000
3/25/2010	8:49:10 AM	Bypass solenoid MFC set to  0.000000
3/25/2010	8:49:10 AM	Tube furnace set to 0
3/25/2010	8:54:11 AM	Helium valve closed
3/25/2010	8:54:11 AM	H2 valve closed
3/25/2010	8:54:11 AM	BCl3 valve closed
3/25/2010	8:54:11 AM	PH3 valve closed
3/25/2010	8:54:11 AM	SiCl4 pre valve closed
3/25/2010	8:54:11 AM	SiCl4 post valve closed
3/25/2010	8:54:11 AM	Bubbler valve closed
3/25/2010	8:54:11 AM	Main Vac valve opened
3/25/2010	8:54:11 AM	Bypass valve opened
3/25/2010	8:54:11 AM	Helium MFC set to  0.000000
3/25/2010	8:54:11 AM	H2 MFC set to  0.000000
3/25/2010	8:54:11 AM	BCl3 MFC set to  0.000000
3/25/2010	8:54:11 AM	SiCl4 MFC set to  0.000000
3/25/2010	8:54:11 AM	Bypass solenoid MFC set to  0.000000
3/25/2010	8:54:11 AM	Tube furnace set to 0
3/25/2010	8:54:12 AM	Run finished at 8:54 AM
3/25/2010	8:54:12 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/25/2010	9:06:03 AM	Bypass valve closed
3/25/2010	9:06:04 AM	Main Vac valve closed
3/25/2010	9:06:28 AM	Bypass valve opened
3/25/2010	9:06:29 AM	Main Vac valve opened
3/25/2010	9:07:49 AM	Recipe started at 9:07 AM
3/25/2010	9:07:49 AM	Helium valve closed
3/25/2010	9:07:49 AM	BCl3 valve closed
3/25/2010	9:07:49 AM	PH3 valve closed
3/25/2010	9:07:49 AM	SiCl4 pre valve closed
3/25/2010	9:07:49 AM	SiCl4 post valve closed
3/25/2010	9:07:49 AM	Main Vac valve closed
3/25/2010	9:07:49 AM	Bypass valve closed
3/25/2010	9:07:49 AM	Bubbler valve closed
3/25/2010	9:07:49 AM	H2 valve opened
3/25/2010	9:07:49 AM	Helium MFC set to  0.000000
3/25/2010	9:07:49 AM	H2 MFC set to  500.000000
3/25/2010	9:07:49 AM	BCl3 MFC set to  0.000000
3/25/2010	9:07:49 AM	SiCl4 MFC set to  0.000000
3/25/2010	9:07:49 AM	Bypass solenoid MFC set to  0.000000
3/25/2010	9:07:49 AM	Tube furnace set to 0
3/25/2010	9:09:11 AM	Helium valve closed
3/25/2010	9:09:11 AM	BCl3 valve closed
3/25/2010	9:09:11 AM	PH3 valve closed
3/25/2010	9:09:11 AM	SiCl4 pre valve closed
3/25/2010	9:09:11 AM	SiCl4 post valve closed
3/25/2010	9:09:12 AM	Main Vac valve closed
3/25/2010	9:09:12 AM	Bypass valve closed
3/25/2010	9:09:12 AM	H2 valve opened
3/25/2010	9:09:12 AM	Bubbler valve opened
3/25/2010	9:09:12 AM	Helium MFC set to  0.000000
3/25/2010	9:09:12 AM	H2 MFC set to  500.000000
3/25/2010	9:09:12 AM	BCl3 MFC set to  0.000000
3/25/2010	9:09:12 AM	SiCl4 MFC set to  0.000000
3/25/2010	9:09:12 AM	Bypass solenoid MFC set to  0.000000
3/25/2010	9:09:12 AM	Tube furnace set to 0
3/25/2010	9:29:12 AM	Helium valve closed
3/25/2010	9:29:12 AM	PH3 valve closed
3/25/2010	9:29:12 AM	Main Vac valve closed
3/25/2010	9:29:12 AM	Bypass valve closed
3/25/2010	9:29:12 AM	H2 valve opened
3/25/2010	9:29:12 AM	BCl3 valve opened
3/25/2010	9:29:12 AM	SiCl4 pre valve opened
3/25/2010	9:29:12 AM	SiCl4 post valve opened
3/25/2010	9:29:12 AM	Bubbler valve opened
3/25/2010	9:29:12 AM	Helium MFC set to  0.000000
3/25/2010	9:29:12 AM	H2 MFC set to  500.000000
3/25/2010	9:29:12 AM	BCl3 MFC set to  35.000000
3/25/2010	9:29:12 AM	SiCl4 MFC set to  325.000000
3/25/2010	9:29:12 AM	Bypass solenoid MFC set to  0.000000
3/25/2010	9:29:12 AM	Tube furnace set to 0
3/25/2010	9:49:12 AM	H2 valve closed
3/25/2010	9:49:12 AM	BCl3 valve closed
3/25/2010	9:49:12 AM	PH3 valve closed
3/25/2010	9:49:12 AM	SiCl4 pre valve closed
3/25/2010	9:49:12 AM	SiCl4 post valve closed
3/25/2010	9:49:12 AM	Main Vac valve closed
3/25/2010	9:49:12 AM	Bypass valve closed
3/25/2010	9:49:12 AM	Helium valve opened
3/25/2010	9:49:12 AM	Bubbler valve opened
3/25/2010	9:49:12 AM	Helium MFC set to  500.000000
3/25/2010	9:49:12 AM	H2 MFC set to  0.000000
3/25/2010	9:49:12 AM	BCl3 MFC set to  0.000000
3/25/2010	9:49:12 AM	SiCl4 MFC set to  0.000000
3/25/2010	9:49:12 AM	Bypass solenoid MFC set to  0.000000
3/25/2010	9:49:12 AM	Tube furnace set to 0
3/25/2010	10:09:12 AM	Helium valve closed
3/25/2010	10:09:12 AM	H2 valve closed
3/25/2010	10:09:12 AM	BCl3 valve closed
3/25/2010	10:09:12 AM	PH3 valve closed
3/25/2010	10:09:12 AM	SiCl4 pre valve closed
3/25/2010	10:09:12 AM	SiCl4 post valve closed
3/25/2010	10:09:12 AM	Main Vac valve closed
3/25/2010	10:09:12 AM	Bypass valve closed
3/25/2010	10:09:12 AM	Bubbler valve closed
3/25/2010	10:09:12 AM	Helium MFC set to  0.000000
3/25/2010	10:09:12 AM	H2 MFC set to  0.000000
3/25/2010	10:09:12 AM	BCl3 MFC set to  0.000000
3/25/2010	10:09:12 AM	SiCl4 MFC set to  0.000000
3/25/2010	10:09:12 AM	Bypass solenoid MFC set to  0.000000
3/25/2010	10:09:12 AM	Tube furnace set to 0
3/25/2010	10:09:13 AM	Run finished at 10:09 AM
3/25/2010	10:31:51 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/25/2010	10:31:52 AM	Recipe started at 10:31 AM
3/25/2010	10:31:52 AM	Helium valve closed
3/25/2010	10:31:52 AM	H2 valve closed
3/25/2010	10:31:52 AM	BCl3 valve closed
3/25/2010	10:31:52 AM	PH3 valve closed
3/25/2010	10:31:52 AM	SiCl4 pre valve closed
3/25/2010	10:31:52 AM	SiCl4 post valve closed
3/25/2010	10:31:52 AM	Main Vac valve closed
3/25/2010	10:31:52 AM	Bubbler valve closed
3/25/2010	10:31:52 AM	Bypass valve opened
3/25/2010	10:31:52 AM	Helium MFC set to  0.000000
3/25/2010	10:31:52 AM	H2 MFC set to  0.000000
3/25/2010	10:31:52 AM	BCl3 MFC set to  0.000000
3/25/2010	10:31:52 AM	SiCl4 MFC set to  0.000000
3/25/2010	10:31:52 AM	Bypass solenoid MFC set to  0.000000
3/25/2010	10:31:52 AM	Tube furnace set to 0
3/25/2010	10:32:24 AM	Helium valve closed
3/25/2010	10:32:24 AM	H2 valve closed
3/25/2010	10:32:24 AM	BCl3 valve closed
3/25/2010	10:32:24 AM	PH3 valve closed
3/25/2010	10:32:24 AM	SiCl4 pre valve closed
3/25/2010	10:32:24 AM	SiCl4 post valve closed
3/25/2010	10:32:24 AM	Bubbler valve closed
3/25/2010	10:32:24 AM	Main Vac valve opened
3/25/2010	10:32:24 AM	Bypass valve opened
3/25/2010	10:32:24 AM	Helium MFC set to  0.000000
3/25/2010	10:32:24 AM	H2 MFC set to  0.000000
3/25/2010	10:32:24 AM	BCl3 MFC set to  0.000000
3/25/2010	10:32:24 AM	SiCl4 MFC set to  0.000000
3/25/2010	10:32:24 AM	Bypass solenoid MFC set to  0.000000
3/25/2010	10:32:24 AM	Tube furnace set to 0
3/25/2010	10:32:25 AM	Run finished at 10:32 AM
3/25/2010	10:32:25 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/25/2010	10:32:54 AM	Bypass valve closed
3/25/2010	10:32:54 AM	Main Vac valve closed
3/25/2010	10:33:00 AM	Bypass valve opened
3/25/2010	10:33:00 AM	Main Vac valve opened
3/25/2010	10:33:09 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/25/2010	10:33:14 AM	Recipe started at 10:33 AM
3/25/2010	10:33:14 AM	H2 valve closed
3/25/2010	10:33:14 AM	BCl3 valve closed
3/25/2010	10:33:14 AM	PH3 valve closed
3/25/2010	10:33:14 AM	SiCl4 pre valve closed
3/25/2010	10:33:14 AM	SiCl4 post valve closed
3/25/2010	10:33:14 AM	Main Vac valve closed
3/25/2010	10:33:14 AM	Bypass valve closed
3/25/2010	10:33:14 AM	Bubbler valve closed
3/25/2010	10:33:14 AM	Helium valve opened
3/25/2010	10:33:14 AM	Helium MFC set to  500.000000
3/25/2010	10:33:14 AM	H2 MFC set to  0.000000
3/25/2010	10:33:14 AM	BCl3 MFC set to  0.000000
3/25/2010	10:33:14 AM	SiCl4 MFC set to  0.000000
3/25/2010	10:33:14 AM	Bypass solenoid MFC set to  0.000000
3/25/2010	10:33:14 AM	Tube furnace set to 0
3/25/2010	10:34:36 AM	Helium valve closed
3/25/2010	10:34:36 AM	H2 valve closed
3/25/2010	10:34:36 AM	BCl3 valve closed
3/25/2010	10:34:36 AM	PH3 valve closed
3/25/2010	10:34:36 AM	SiCl4 pre valve closed
3/25/2010	10:34:36 AM	SiCl4 post valve closed
3/25/2010	10:34:36 AM	Main Vac valve closed
3/25/2010	10:34:36 AM	Bypass valve closed
3/25/2010	10:34:36 AM	Bubbler valve closed
3/25/2010	10:34:36 AM	Helium MFC set to  0.000000
3/25/2010	10:34:36 AM	H2 MFC set to  0.000000
3/25/2010	10:34:36 AM	BCl3 MFC set to  0.000000
3/25/2010	10:34:36 AM	SiCl4 MFC set to  0.000000
3/25/2010	10:34:36 AM	Bypass solenoid MFC set to  0.000000
3/25/2010	10:34:36 AM	Tube furnace set to 0
3/25/2010	10:34:52 AM	Helium valve closed
3/25/2010	10:34:52 AM	H2 valve closed
3/25/2010	10:34:52 AM	BCl3 valve closed
3/25/2010	10:34:52 AM	PH3 valve closed
3/25/2010	10:34:52 AM	SiCl4 pre valve closed
3/25/2010	10:34:52 AM	SiCl4 post valve closed
3/25/2010	10:34:52 AM	Main Vac valve closed
3/25/2010	10:34:52 AM	Bubbler valve closed
3/25/2010	10:34:52 AM	Bypass valve opened
3/25/2010	10:34:52 AM	Helium MFC set to  0.000000
3/25/2010	10:34:52 AM	H2 MFC set to  0.000000
3/25/2010	10:34:52 AM	BCl3 MFC set to  0.000000
3/25/2010	10:34:52 AM	SiCl4 MFC set to  0.000000
3/25/2010	10:34:52 AM	Bypass solenoid MFC set to  0.000000
3/25/2010	10:34:52 AM	Tube furnace set to 0
3/25/2010	10:35:14 AM	Helium valve closed
3/25/2010	10:35:14 AM	H2 valve closed
3/25/2010	10:35:14 AM	BCl3 valve closed
3/25/2010	10:35:14 AM	PH3 valve closed
3/25/2010	10:35:14 AM	SiCl4 pre valve closed
3/25/2010	10:35:14 AM	SiCl4 post valve closed
3/25/2010	10:35:14 AM	Bubbler valve closed
3/25/2010	10:35:14 AM	Main Vac valve opened
3/25/2010	10:35:14 AM	Bypass valve opened
3/25/2010	10:35:14 AM	Helium MFC set to  0.000000
3/25/2010	10:35:14 AM	H2 MFC set to  0.000000
3/25/2010	10:35:14 AM	BCl3 MFC set to  0.000000
3/25/2010	10:35:14 AM	SiCl4 MFC set to  0.000000
3/25/2010	10:35:14 AM	Bypass solenoid MFC set to  0.000000
3/25/2010	10:35:14 AM	Tube furnace set to 0
3/25/2010	10:40:15 AM	H2 valve closed
3/25/2010	10:40:15 AM	BCl3 valve closed
3/25/2010	10:40:15 AM	PH3 valve closed
3/25/2010	10:40:15 AM	SiCl4 pre valve closed
3/25/2010	10:40:15 AM	SiCl4 post valve closed
3/25/2010	10:40:15 AM	Main Vac valve closed
3/25/2010	10:40:15 AM	Bypass valve closed
3/25/2010	10:40:15 AM	Bubbler valve closed
3/25/2010	10:40:15 AM	Helium valve opened
3/25/2010	10:40:15 AM	Helium MFC set to  500.000000
3/25/2010	10:40:15 AM	H2 MFC set to  0.000000
3/25/2010	10:40:15 AM	BCl3 MFC set to  0.000000
3/25/2010	10:40:15 AM	SiCl4 MFC set to  0.000000
3/25/2010	10:40:15 AM	Bypass solenoid MFC set to  0.000000
3/25/2010	10:40:15 AM	Tube furnace set to 0
3/25/2010	10:41:37 AM	Helium valve closed
3/25/2010	10:41:37 AM	H2 valve closed
3/25/2010	10:41:37 AM	BCl3 valve closed
3/25/2010	10:41:37 AM	PH3 valve closed
3/25/2010	10:41:37 AM	SiCl4 pre valve closed
3/25/2010	10:41:37 AM	SiCl4 post valve closed
3/25/2010	10:41:37 AM	Main Vac valve closed
3/25/2010	10:41:37 AM	Bypass valve closed
3/25/2010	10:41:37 AM	Bubbler valve closed
3/25/2010	10:41:37 AM	Helium MFC set to  0.000000
3/25/2010	10:41:37 AM	H2 MFC set to  0.000000
3/25/2010	10:41:37 AM	BCl3 MFC set to  0.000000
3/25/2010	10:41:37 AM	SiCl4 MFC set to  0.000000
3/25/2010	10:41:37 AM	Bypass solenoid MFC set to  0.000000
3/25/2010	10:41:37 AM	Tube furnace set to 0
3/25/2010	10:41:52 AM	Helium valve closed
3/25/2010	10:41:52 AM	H2 valve closed
3/25/2010	10:41:52 AM	BCl3 valve closed
3/25/2010	10:41:52 AM	PH3 valve closed
3/25/2010	10:41:52 AM	SiCl4 pre valve closed
3/25/2010	10:41:52 AM	SiCl4 post valve closed
3/25/2010	10:41:52 AM	Main Vac valve closed
3/25/2010	10:41:52 AM	Bubbler valve closed
3/25/2010	10:41:52 AM	Bypass valve opened
3/25/2010	10:41:52 AM	Helium MFC set to  0.000000
3/25/2010	10:41:52 AM	H2 MFC set to  0.000000
3/25/2010	10:41:52 AM	BCl3 MFC set to  0.000000
3/25/2010	10:41:52 AM	SiCl4 MFC set to  0.000000
3/25/2010	10:41:52 AM	Bypass solenoid MFC set to  0.000000
3/25/2010	10:41:52 AM	Tube furnace set to 0
3/25/2010	10:42:15 AM	Helium valve closed
3/25/2010	10:42:15 AM	H2 valve closed
3/25/2010	10:42:15 AM	BCl3 valve closed
3/25/2010	10:42:15 AM	PH3 valve closed
3/25/2010	10:42:15 AM	SiCl4 pre valve closed
3/25/2010	10:42:15 AM	SiCl4 post valve closed
3/25/2010	10:42:15 AM	Bubbler valve closed
3/25/2010	10:42:15 AM	Main Vac valve opened
3/25/2010	10:42:15 AM	Bypass valve opened
3/25/2010	10:42:15 AM	Helium MFC set to  0.000000
3/25/2010	10:42:15 AM	H2 MFC set to  0.000000
3/25/2010	10:42:15 AM	BCl3 MFC set to  0.000000
3/25/2010	10:42:15 AM	SiCl4 MFC set to  0.000000
3/25/2010	10:42:15 AM	Bypass solenoid MFC set to  0.000000
3/25/2010	10:42:15 AM	Tube furnace set to 0
3/25/2010	10:47:15 AM	H2 valve closed
3/25/2010	10:47:15 AM	BCl3 valve closed
3/25/2010	10:47:15 AM	PH3 valve closed
3/25/2010	10:47:15 AM	SiCl4 pre valve closed
3/25/2010	10:47:15 AM	SiCl4 post valve closed
3/25/2010	10:47:15 AM	Main Vac valve closed
3/25/2010	10:47:15 AM	Bypass valve closed
3/25/2010	10:47:15 AM	Bubbler valve closed
3/25/2010	10:47:15 AM	Helium valve opened
3/25/2010	10:47:15 AM	Helium MFC set to  500.000000
3/25/2010	10:47:15 AM	H2 MFC set to  0.000000
3/25/2010	10:47:15 AM	BCl3 MFC set to  0.000000
3/25/2010	10:47:15 AM	SiCl4 MFC set to  0.000000
3/25/2010	10:47:15 AM	Bypass solenoid MFC set to  0.000000
3/25/2010	10:47:15 AM	Tube furnace set to 0
3/25/2010	10:48:38 AM	Helium valve closed
3/25/2010	10:48:38 AM	H2 valve closed
3/25/2010	10:48:38 AM	BCl3 valve closed
3/25/2010	10:48:38 AM	PH3 valve closed
3/25/2010	10:48:38 AM	SiCl4 pre valve closed
3/25/2010	10:48:38 AM	SiCl4 post valve closed
3/25/2010	10:48:38 AM	Main Vac valve closed
3/25/2010	10:48:38 AM	Bypass valve closed
3/25/2010	10:48:38 AM	Bubbler valve closed
3/25/2010	10:48:38 AM	Helium MFC set to  0.000000
3/25/2010	10:48:38 AM	H2 MFC set to  0.000000
3/25/2010	10:48:38 AM	BCl3 MFC set to  0.000000
3/25/2010	10:48:38 AM	SiCl4 MFC set to  0.000000
3/25/2010	10:48:38 AM	Bypass solenoid MFC set to  0.000000
3/25/2010	10:48:38 AM	Tube furnace set to 0
3/25/2010	10:48:53 AM	Helium valve closed
3/25/2010	10:48:53 AM	H2 valve closed
3/25/2010	10:48:53 AM	BCl3 valve closed
3/25/2010	10:48:53 AM	PH3 valve closed
3/25/2010	10:48:53 AM	SiCl4 pre valve closed
3/25/2010	10:48:53 AM	SiCl4 post valve closed
3/25/2010	10:48:53 AM	Main Vac valve closed
3/25/2010	10:48:53 AM	Bubbler valve closed
3/25/2010	10:48:53 AM	Bypass valve opened
3/25/2010	10:48:53 AM	Helium MFC set to  0.000000
3/25/2010	10:48:53 AM	H2 MFC set to  0.000000
3/25/2010	10:48:53 AM	BCl3 MFC set to  0.000000
3/25/2010	10:48:53 AM	SiCl4 MFC set to  0.000000
3/25/2010	10:48:53 AM	Bypass solenoid MFC set to  0.000000
3/25/2010	10:48:53 AM	Tube furnace set to 0
3/25/2010	10:49:16 AM	Helium valve closed
3/25/2010	10:49:16 AM	H2 valve closed
3/25/2010	10:49:16 AM	BCl3 valve closed
3/25/2010	10:49:16 AM	PH3 valve closed
3/25/2010	10:49:16 AM	SiCl4 pre valve closed
3/25/2010	10:49:16 AM	SiCl4 post valve closed
3/25/2010	10:49:16 AM	Bubbler valve closed
3/25/2010	10:49:16 AM	Main Vac valve opened
3/25/2010	10:49:16 AM	Bypass valve opened
3/25/2010	10:49:16 AM	Helium MFC set to  0.000000
3/25/2010	10:49:16 AM	H2 MFC set to  0.000000
3/25/2010	10:49:16 AM	BCl3 MFC set to  0.000000
3/25/2010	10:49:16 AM	SiCl4 MFC set to  0.000000
3/25/2010	10:49:16 AM	Bypass solenoid MFC set to  0.000000
3/25/2010	10:49:16 AM	Tube furnace set to 0
3/25/2010	10:54:16 AM	Helium valve closed
3/25/2010	10:54:16 AM	H2 valve closed
3/25/2010	10:54:16 AM	BCl3 valve closed
3/25/2010	10:54:16 AM	PH3 valve closed
3/25/2010	10:54:16 AM	SiCl4 pre valve closed
3/25/2010	10:54:16 AM	SiCl4 post valve closed
3/25/2010	10:54:16 AM	Bubbler valve closed
3/25/2010	10:54:16 AM	Main Vac valve opened
3/25/2010	10:54:16 AM	Bypass valve opened
3/25/2010	10:54:16 AM	Helium MFC set to  0.000000
3/25/2010	10:54:16 AM	H2 MFC set to  0.000000
3/25/2010	10:54:16 AM	BCl3 MFC set to  0.000000
3/25/2010	10:54:16 AM	SiCl4 MFC set to  0.000000
3/25/2010	10:54:16 AM	Bypass solenoid MFC set to  0.000000
3/25/2010	10:54:16 AM	Tube furnace set to 0
3/25/2010	10:54:17 AM	Run finished at 10:54 AM
3/25/2010	10:54:17 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/25/2010	12:03:38 PM	Bypass valve closed
3/25/2010	12:03:39 PM	Main Vac valve closed
3/25/2010	12:03:50 PM	Bypass valve opened
3/25/2010	12:03:51 PM	Main Vac valve opened
3/25/2010	12:05:12 PM	Recipe started at 12:05 PM
3/25/2010	12:05:12 PM	Helium valve closed
3/25/2010	12:05:12 PM	BCl3 valve closed
3/25/2010	12:05:12 PM	PH3 valve closed
3/25/2010	12:05:12 PM	SiCl4 pre valve closed
3/25/2010	12:05:12 PM	SiCl4 post valve closed
3/25/2010	12:05:12 PM	Main Vac valve closed
3/25/2010	12:05:12 PM	Bypass valve closed
3/25/2010	12:05:12 PM	Bubbler valve closed
3/25/2010	12:05:12 PM	H2 valve opened
3/25/2010	12:05:12 PM	Helium MFC set to  0.000000
3/25/2010	12:05:12 PM	H2 MFC set to  500.000000
3/25/2010	12:05:12 PM	BCl3 MFC set to  0.000000
3/25/2010	12:05:12 PM	SiCl4 MFC set to  0.000000
3/25/2010	12:05:12 PM	Bypass solenoid MFC set to  0.000000
3/25/2010	12:05:12 PM	Tube furnace set to 0
3/25/2010	12:06:33 PM	Helium valve closed
3/25/2010	12:06:33 PM	BCl3 valve closed
3/25/2010	12:06:33 PM	PH3 valve closed
3/25/2010	12:06:33 PM	SiCl4 pre valve closed
3/25/2010	12:06:33 PM	SiCl4 post valve closed
3/25/2010	12:06:33 PM	Main Vac valve closed
3/25/2010	12:06:33 PM	Bypass valve closed
3/25/2010	12:06:33 PM	H2 valve opened
3/25/2010	12:06:33 PM	Bubbler valve opened
3/25/2010	12:06:33 PM	Helium MFC set to  0.000000
3/25/2010	12:06:33 PM	H2 MFC set to  500.000000
3/25/2010	12:06:33 PM	BCl3 MFC set to  0.000000
3/25/2010	12:06:33 PM	SiCl4 MFC set to  0.000000
3/25/2010	12:06:33 PM	Bypass solenoid MFC set to  0.000000
3/25/2010	12:06:33 PM	Tube furnace set to 0
3/25/2010	12:26:34 PM	Helium valve closed
3/25/2010	12:26:34 PM	PH3 valve closed
3/25/2010	12:26:34 PM	Main Vac valve closed
3/25/2010	12:26:34 PM	Bypass valve closed
3/25/2010	12:26:34 PM	H2 valve opened
3/25/2010	12:26:34 PM	BCl3 valve opened
3/25/2010	12:26:34 PM	SiCl4 pre valve opened
3/25/2010	12:26:34 PM	SiCl4 post valve opened
3/25/2010	12:26:34 PM	Bubbler valve opened
3/25/2010	12:26:34 PM	Helium MFC set to  0.000000
3/25/2010	12:26:34 PM	H2 MFC set to  500.000000
3/25/2010	12:26:34 PM	BCl3 MFC set to  35.000000
3/25/2010	12:26:34 PM	SiCl4 MFC set to  325.000000
3/25/2010	12:26:34 PM	Bypass solenoid MFC set to  0.000000
3/25/2010	12:26:34 PM	Tube furnace set to 0
3/25/2010	12:46:34 PM	H2 valve closed
3/25/2010	12:46:34 PM	BCl3 valve closed
3/25/2010	12:46:34 PM	PH3 valve closed
3/25/2010	12:46:34 PM	SiCl4 pre valve closed
3/25/2010	12:46:34 PM	SiCl4 post valve closed
3/25/2010	12:46:34 PM	Main Vac valve closed
3/25/2010	12:46:34 PM	Bypass valve closed
3/25/2010	12:46:34 PM	Helium valve opened
3/25/2010	12:46:34 PM	Bubbler valve opened
3/25/2010	12:46:34 PM	Helium MFC set to  500.000000
3/25/2010	12:46:34 PM	H2 MFC set to  0.000000
3/25/2010	12:46:34 PM	BCl3 MFC set to  0.000000
3/25/2010	12:46:34 PM	SiCl4 MFC set to  0.000000
3/25/2010	12:46:34 PM	Bypass solenoid MFC set to  0.000000
3/25/2010	12:46:34 PM	Tube furnace set to 0
3/25/2010	1:06:34 PM	Helium valve closed
3/25/2010	1:06:34 PM	H2 valve closed
3/25/2010	1:06:34 PM	BCl3 valve closed
3/25/2010	1:06:34 PM	PH3 valve closed
3/25/2010	1:06:34 PM	SiCl4 pre valve closed
3/25/2010	1:06:34 PM	SiCl4 post valve closed
3/25/2010	1:06:34 PM	Main Vac valve closed
3/25/2010	1:06:34 PM	Bypass valve closed
3/25/2010	1:06:34 PM	Bubbler valve closed
3/25/2010	1:06:34 PM	Helium MFC set to  0.000000
3/25/2010	1:06:34 PM	H2 MFC set to  0.000000
3/25/2010	1:06:34 PM	BCl3 MFC set to  0.000000
3/25/2010	1:06:34 PM	SiCl4 MFC set to  0.000000
3/25/2010	1:06:34 PM	Bypass solenoid MFC set to  0.000000
3/25/2010	1:06:34 PM	Tube furnace set to 0
3/25/2010	1:06:35 PM	Run finished at 1:06 PM
3/25/2010	1:16:59 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/25/2010	1:16:59 PM	Recipe started at 1:16 PM
3/25/2010	1:16:59 PM	Helium valve closed
3/25/2010	1:16:59 PM	H2 valve closed
3/25/2010	1:16:59 PM	BCl3 valve closed
3/25/2010	1:16:59 PM	PH3 valve closed
3/25/2010	1:16:59 PM	SiCl4 pre valve closed
3/25/2010	1:16:59 PM	SiCl4 post valve closed
3/25/2010	1:16:59 PM	Main Vac valve closed
3/25/2010	1:16:59 PM	Bubbler valve closed
3/25/2010	1:16:59 PM	Bypass valve opened
3/25/2010	1:16:59 PM	Helium MFC set to  0.000000
3/25/2010	1:16:59 PM	H2 MFC set to  0.000000
3/25/2010	1:16:59 PM	BCl3 MFC set to  0.000000
3/25/2010	1:16:59 PM	SiCl4 MFC set to  0.000000
3/25/2010	1:16:59 PM	Bypass solenoid MFC set to  0.000000
3/25/2010	1:16:59 PM	Tube furnace set to 0
3/25/2010	1:17:32 PM	Helium valve closed
3/25/2010	1:17:32 PM	H2 valve closed
3/25/2010	1:17:32 PM	BCl3 valve closed
3/25/2010	1:17:32 PM	PH3 valve closed
3/25/2010	1:17:32 PM	SiCl4 pre valve closed
3/25/2010	1:17:32 PM	SiCl4 post valve closed
3/25/2010	1:17:32 PM	Bubbler valve closed
3/25/2010	1:17:32 PM	Main Vac valve opened
3/25/2010	1:17:32 PM	Bypass valve opened
3/25/2010	1:17:32 PM	Helium MFC set to  0.000000
3/25/2010	1:17:32 PM	H2 MFC set to  0.000000
3/25/2010	1:17:32 PM	BCl3 MFC set to  0.000000
3/25/2010	1:17:32 PM	SiCl4 MFC set to  0.000000
3/25/2010	1:17:32 PM	Bypass solenoid MFC set to  0.000000
3/25/2010	1:17:32 PM	Tube furnace set to 0
3/25/2010	1:17:32 PM	Run finished at 1:17 PM
3/25/2010	1:17:32 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/25/2010	1:34:40 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/25/2010	1:34:46 PM	Recipe started at 1:34 PM
3/25/2010	1:34:46 PM	H2 valve closed
3/25/2010	1:34:46 PM	BCl3 valve closed
3/25/2010	1:34:46 PM	PH3 valve closed
3/25/2010	1:34:46 PM	SiCl4 pre valve closed
3/25/2010	1:34:46 PM	SiCl4 post valve closed
3/25/2010	1:34:46 PM	Main Vac valve closed
3/25/2010	1:34:46 PM	Bypass valve closed
3/25/2010	1:34:46 PM	Bubbler valve closed
3/25/2010	1:34:46 PM	Helium valve opened
3/25/2010	1:34:46 PM	Helium MFC set to  500.000000
3/25/2010	1:34:46 PM	H2 MFC set to  0.000000
3/25/2010	1:34:46 PM	BCl3 MFC set to  0.000000
3/25/2010	1:34:46 PM	SiCl4 MFC set to  0.000000
3/25/2010	1:34:46 PM	Bypass solenoid MFC set to  0.000000
3/25/2010	1:34:46 PM	Tube furnace set to 0
3/25/2010	1:36:07 PM	Helium valve closed
3/25/2010	1:36:07 PM	H2 valve closed
3/25/2010	1:36:07 PM	BCl3 valve closed
3/25/2010	1:36:07 PM	PH3 valve closed
3/25/2010	1:36:07 PM	SiCl4 pre valve closed
3/25/2010	1:36:07 PM	SiCl4 post valve closed
3/25/2010	1:36:07 PM	Main Vac valve closed
3/25/2010	1:36:07 PM	Bypass valve closed
3/25/2010	1:36:07 PM	Bubbler valve closed
3/25/2010	1:36:07 PM	Helium MFC set to  0.000000
3/25/2010	1:36:07 PM	H2 MFC set to  0.000000
3/25/2010	1:36:07 PM	BCl3 MFC set to  0.000000
3/25/2010	1:36:07 PM	SiCl4 MFC set to  0.000000
3/25/2010	1:36:07 PM	Bypass solenoid MFC set to  0.000000
3/25/2010	1:36:07 PM	Tube furnace set to 0
3/25/2010	1:36:22 PM	Helium valve closed
3/25/2010	1:36:22 PM	H2 valve closed
3/25/2010	1:36:22 PM	BCl3 valve closed
3/25/2010	1:36:22 PM	PH3 valve closed
3/25/2010	1:36:22 PM	SiCl4 pre valve closed
3/25/2010	1:36:22 PM	SiCl4 post valve closed
3/25/2010	1:36:22 PM	Main Vac valve closed
3/25/2010	1:36:22 PM	Bubbler valve closed
3/25/2010	1:36:22 PM	Bypass valve opened
3/25/2010	1:36:22 PM	Helium MFC set to  0.000000
3/25/2010	1:36:22 PM	H2 MFC set to  0.000000
3/25/2010	1:36:22 PM	BCl3 MFC set to  0.000000
3/25/2010	1:36:22 PM	SiCl4 MFC set to  0.000000
3/25/2010	1:36:22 PM	Bypass solenoid MFC set to  0.000000
3/25/2010	1:36:22 PM	Tube furnace set to 0
3/25/2010	1:36:45 PM	Helium valve closed
3/25/2010	1:36:45 PM	H2 valve closed
3/25/2010	1:36:45 PM	BCl3 valve closed
3/25/2010	1:36:45 PM	PH3 valve closed
3/25/2010	1:36:45 PM	SiCl4 pre valve closed
3/25/2010	1:36:45 PM	SiCl4 post valve closed
3/25/2010	1:36:45 PM	Bubbler valve closed
3/25/2010	1:36:45 PM	Main Vac valve opened
3/25/2010	1:36:45 PM	Bypass valve opened
3/25/2010	1:36:45 PM	Helium MFC set to  0.000000
3/25/2010	1:36:45 PM	H2 MFC set to  0.000000
3/25/2010	1:36:45 PM	BCl3 MFC set to  0.000000
3/25/2010	1:36:45 PM	SiCl4 MFC set to  0.000000
3/25/2010	1:36:45 PM	Bypass solenoid MFC set to  0.000000
3/25/2010	1:36:45 PM	Tube furnace set to 0
3/25/2010	1:41:45 PM	H2 valve closed
3/25/2010	1:41:45 PM	BCl3 valve closed
3/25/2010	1:41:45 PM	PH3 valve closed
3/25/2010	1:41:45 PM	SiCl4 pre valve closed
3/25/2010	1:41:45 PM	SiCl4 post valve closed
3/25/2010	1:41:45 PM	Main Vac valve closed
3/25/2010	1:41:45 PM	Bypass valve closed
3/25/2010	1:41:45 PM	Bubbler valve closed
3/25/2010	1:41:45 PM	Helium valve opened
3/25/2010	1:41:45 PM	Helium MFC set to  500.000000
3/25/2010	1:41:45 PM	H2 MFC set to  0.000000
3/25/2010	1:41:45 PM	BCl3 MFC set to  0.000000
3/25/2010	1:41:45 PM	SiCl4 MFC set to  0.000000
3/25/2010	1:41:45 PM	Bypass solenoid MFC set to  0.000000
3/25/2010	1:41:45 PM	Tube furnace set to 0
3/25/2010	1:43:07 PM	Helium valve closed
3/25/2010	1:43:07 PM	H2 valve closed
3/25/2010	1:43:07 PM	BCl3 valve closed
3/25/2010	1:43:07 PM	PH3 valve closed
3/25/2010	1:43:07 PM	SiCl4 pre valve closed
3/25/2010	1:43:07 PM	SiCl4 post valve closed
3/25/2010	1:43:07 PM	Main Vac valve closed
3/25/2010	1:43:07 PM	Bypass valve closed
3/25/2010	1:43:07 PM	Bubbler valve closed
3/25/2010	1:43:07 PM	Helium MFC set to  0.000000
3/25/2010	1:43:07 PM	H2 MFC set to  0.000000
3/25/2010	1:43:07 PM	BCl3 MFC set to  0.000000
3/25/2010	1:43:07 PM	SiCl4 MFC set to  0.000000
3/25/2010	1:43:07 PM	Bypass solenoid MFC set to  0.000000
3/25/2010	1:43:07 PM	Tube furnace set to 0
3/25/2010	1:43:22 PM	Helium valve closed
3/25/2010	1:43:22 PM	H2 valve closed
3/25/2010	1:43:22 PM	BCl3 valve closed
3/25/2010	1:43:22 PM	PH3 valve closed
3/25/2010	1:43:22 PM	SiCl4 pre valve closed
3/25/2010	1:43:22 PM	SiCl4 post valve closed
3/25/2010	1:43:22 PM	Main Vac valve closed
3/25/2010	1:43:22 PM	Bubbler valve closed
3/25/2010	1:43:22 PM	Bypass valve opened
3/25/2010	1:43:22 PM	Helium MFC set to  0.000000
3/25/2010	1:43:22 PM	H2 MFC set to  0.000000
3/25/2010	1:43:22 PM	BCl3 MFC set to  0.000000
3/25/2010	1:43:22 PM	SiCl4 MFC set to  0.000000
3/25/2010	1:43:22 PM	Bypass solenoid MFC set to  0.000000
3/25/2010	1:43:22 PM	Tube furnace set to 0
3/25/2010	1:43:44 PM	Helium valve closed
3/25/2010	1:43:44 PM	H2 valve closed
3/25/2010	1:43:44 PM	BCl3 valve closed
3/25/2010	1:43:44 PM	PH3 valve closed
3/25/2010	1:43:44 PM	SiCl4 pre valve closed
3/25/2010	1:43:44 PM	SiCl4 post valve closed
3/25/2010	1:43:44 PM	Bubbler valve closed
3/25/2010	1:43:44 PM	Main Vac valve opened
3/25/2010	1:43:44 PM	Bypass valve opened
3/25/2010	1:43:44 PM	Helium MFC set to  0.000000
3/25/2010	1:43:44 PM	H2 MFC set to  0.000000
3/25/2010	1:43:44 PM	BCl3 MFC set to  0.000000
3/25/2010	1:43:44 PM	SiCl4 MFC set to  0.000000
3/25/2010	1:43:45 PM	Bypass solenoid MFC set to  0.000000
3/25/2010	1:43:45 PM	Tube furnace set to 0
3/25/2010	1:48:45 PM	H2 valve closed
3/25/2010	1:48:45 PM	BCl3 valve closed
3/25/2010	1:48:45 PM	PH3 valve closed
3/25/2010	1:48:45 PM	SiCl4 pre valve closed
3/25/2010	1:48:45 PM	SiCl4 post valve closed
3/25/2010	1:48:45 PM	Main Vac valve closed
3/25/2010	1:48:45 PM	Bypass valve closed
3/25/2010	1:48:45 PM	Bubbler valve closed
3/25/2010	1:48:45 PM	Helium valve opened
3/25/2010	1:48:45 PM	Helium MFC set to  500.000000
3/25/2010	1:48:45 PM	H2 MFC set to  0.000000
3/25/2010	1:48:45 PM	BCl3 MFC set to  0.000000
3/25/2010	1:48:45 PM	SiCl4 MFC set to  0.000000
3/25/2010	1:48:45 PM	Bypass solenoid MFC set to  0.000000
3/25/2010	1:48:45 PM	Tube furnace set to 0
3/25/2010	1:50:06 PM	Helium valve closed
3/25/2010	1:50:06 PM	H2 valve closed
3/25/2010	1:50:06 PM	BCl3 valve closed
3/25/2010	1:50:06 PM	PH3 valve closed
3/25/2010	1:50:06 PM	SiCl4 pre valve closed
3/25/2010	1:50:06 PM	SiCl4 post valve closed
3/25/2010	1:50:06 PM	Main Vac valve closed
3/25/2010	1:50:06 PM	Bypass valve closed
3/25/2010	1:50:06 PM	Bubbler valve closed
3/25/2010	1:50:06 PM	Helium MFC set to  0.000000
3/25/2010	1:50:06 PM	H2 MFC set to  0.000000
3/25/2010	1:50:06 PM	BCl3 MFC set to  0.000000
3/25/2010	1:50:06 PM	SiCl4 MFC set to  0.000000
3/25/2010	1:50:06 PM	Bypass solenoid MFC set to  0.000000
3/25/2010	1:50:06 PM	Tube furnace set to 0
3/25/2010	1:50:22 PM	Helium valve closed
3/25/2010	1:50:22 PM	H2 valve closed
3/25/2010	1:50:22 PM	BCl3 valve closed
3/25/2010	1:50:22 PM	PH3 valve closed
3/25/2010	1:50:22 PM	SiCl4 pre valve closed
3/25/2010	1:50:22 PM	SiCl4 post valve closed
3/25/2010	1:50:22 PM	Main Vac valve closed
3/25/2010	1:50:22 PM	Bubbler valve closed
3/25/2010	1:50:22 PM	Bypass valve opened
3/25/2010	1:50:22 PM	Helium MFC set to  0.000000
3/25/2010	1:50:22 PM	H2 MFC set to  0.000000
3/25/2010	1:50:22 PM	BCl3 MFC set to  0.000000
3/25/2010	1:50:22 PM	SiCl4 MFC set to  0.000000
3/25/2010	1:50:22 PM	Bypass solenoid MFC set to  0.000000
3/25/2010	1:50:22 PM	Tube furnace set to 0
3/25/2010	1:50:44 PM	Helium valve closed
3/25/2010	1:50:44 PM	H2 valve closed
3/25/2010	1:50:44 PM	BCl3 valve closed
3/25/2010	1:50:44 PM	PH3 valve closed
3/25/2010	1:50:44 PM	SiCl4 pre valve closed
3/25/2010	1:50:44 PM	SiCl4 post valve closed
3/25/2010	1:50:44 PM	Bubbler valve closed
3/25/2010	1:50:44 PM	Main Vac valve opened
3/25/2010	1:50:44 PM	Bypass valve opened
3/25/2010	1:50:44 PM	Helium MFC set to  0.000000
3/25/2010	1:50:44 PM	H2 MFC set to  0.000000
3/25/2010	1:50:44 PM	BCl3 MFC set to  0.000000
3/25/2010	1:50:44 PM	SiCl4 MFC set to  0.000000
3/25/2010	1:50:44 PM	Bypass solenoid MFC set to  0.000000
3/25/2010	1:50:44 PM	Tube furnace set to 0
3/25/2010	1:55:44 PM	Helium valve closed
3/25/2010	1:55:44 PM	H2 valve closed
3/25/2010	1:55:44 PM	BCl3 valve closed
3/25/2010	1:55:44 PM	PH3 valve closed
3/25/2010	1:55:44 PM	SiCl4 pre valve closed
3/25/2010	1:55:44 PM	SiCl4 post valve closed
3/25/2010	1:55:44 PM	Bubbler valve closed
3/25/2010	1:55:44 PM	Main Vac valve opened
3/25/2010	1:55:44 PM	Bypass valve opened
3/25/2010	1:55:44 PM	Helium MFC set to  0.000000
3/25/2010	1:55:44 PM	H2 MFC set to  0.000000
3/25/2010	1:55:44 PM	BCl3 MFC set to  0.000000
3/25/2010	1:55:44 PM	SiCl4 MFC set to  0.000000
3/25/2010	1:55:44 PM	Bypass solenoid MFC set to  0.000000
3/25/2010	1:55:44 PM	Tube furnace set to 0
3/25/2010	1:55:46 PM	Run finished at 1:55 PM
3/25/2010	1:55:46 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/25/2010	2:52:45 PM	Bypass valve closed
3/25/2010	2:52:46 PM	Main Vac valve closed
3/25/2010	2:53:22 PM	Bypass valve opened
3/25/2010	2:53:23 PM	Main Vac valve opened
3/25/2010	2:54:00 PM	Recipe started at 2:53 PM
3/25/2010	2:54:00 PM	Helium valve closed
3/25/2010	2:54:00 PM	BCl3 valve closed
3/25/2010	2:54:00 PM	PH3 valve closed
3/25/2010	2:54:00 PM	SiCl4 pre valve closed
3/25/2010	2:54:00 PM	SiCl4 post valve closed
3/25/2010	2:54:00 PM	Main Vac valve closed
3/25/2010	2:54:00 PM	Bypass valve closed
3/25/2010	2:54:00 PM	Bubbler valve closed
3/25/2010	2:54:00 PM	H2 valve opened
3/25/2010	2:54:00 PM	Helium MFC set to  0.000000
3/25/2010	2:54:00 PM	H2 MFC set to  500.000000
3/25/2010	2:54:00 PM	BCl3 MFC set to  0.000000
3/25/2010	2:54:00 PM	SiCl4 MFC set to  0.000000
3/25/2010	2:54:00 PM	Bypass solenoid MFC set to  0.000000
3/25/2010	2:54:00 PM	Tube furnace set to 0
3/25/2010	2:55:23 PM	Helium valve closed
3/25/2010	2:55:23 PM	BCl3 valve closed
3/25/2010	2:55:23 PM	PH3 valve closed
3/25/2010	2:55:23 PM	SiCl4 pre valve closed
3/25/2010	2:55:23 PM	SiCl4 post valve closed
3/25/2010	2:55:23 PM	Main Vac valve closed
3/25/2010	2:55:23 PM	Bypass valve closed
3/25/2010	2:55:23 PM	H2 valve opened
3/25/2010	2:55:23 PM	Bubbler valve opened
3/25/2010	2:55:23 PM	Helium MFC set to  0.000000
3/25/2010	2:55:23 PM	H2 MFC set to  500.000000
3/25/2010	2:55:23 PM	BCl3 MFC set to  0.000000
3/25/2010	2:55:23 PM	SiCl4 MFC set to  0.000000
3/25/2010	2:55:23 PM	Bypass solenoid MFC set to  0.000000
3/25/2010	2:55:23 PM	Tube furnace set to 0
3/25/2010	3:15:23 PM	Helium valve closed
3/25/2010	3:15:23 PM	PH3 valve closed
3/25/2010	3:15:23 PM	Main Vac valve closed
3/25/2010	3:15:23 PM	Bypass valve closed
3/25/2010	3:15:23 PM	H2 valve opened
3/25/2010	3:15:23 PM	BCl3 valve opened
3/25/2010	3:15:23 PM	SiCl4 pre valve opened
3/25/2010	3:15:23 PM	SiCl4 post valve opened
3/25/2010	3:15:23 PM	Bubbler valve opened
3/25/2010	3:15:23 PM	Helium MFC set to  0.000000
3/25/2010	3:15:23 PM	H2 MFC set to  500.000000
3/25/2010	3:15:23 PM	BCl3 MFC set to  35.000000
3/25/2010	3:15:23 PM	SiCl4 MFC set to  325.000000
3/25/2010	3:15:23 PM	Bypass solenoid MFC set to  0.000000
3/25/2010	3:15:23 PM	Tube furnace set to 0
3/25/2010	3:35:23 PM	H2 valve closed
3/25/2010	3:35:23 PM	BCl3 valve closed
3/25/2010	3:35:23 PM	PH3 valve closed
3/25/2010	3:35:23 PM	SiCl4 pre valve closed
3/25/2010	3:35:23 PM	SiCl4 post valve closed
3/25/2010	3:35:23 PM	Main Vac valve closed
3/25/2010	3:35:23 PM	Bypass valve closed
3/25/2010	3:35:23 PM	Helium valve opened
3/25/2010	3:35:23 PM	Bubbler valve opened
3/25/2010	3:35:23 PM	Helium MFC set to  500.000000
3/25/2010	3:35:23 PM	H2 MFC set to  0.000000
3/25/2010	3:35:23 PM	BCl3 MFC set to  0.000000
3/25/2010	3:35:23 PM	SiCl4 MFC set to  0.000000
3/25/2010	3:35:23 PM	Bypass solenoid MFC set to  0.000000
3/25/2010	3:35:23 PM	Tube furnace set to 0
3/25/2010	3:55:23 PM	Helium valve closed
3/25/2010	3:55:23 PM	H2 valve closed
3/25/2010	3:55:23 PM	BCl3 valve closed
3/25/2010	3:55:24 PM	PH3 valve closed
3/25/2010	3:55:24 PM	SiCl4 pre valve closed
3/25/2010	3:55:24 PM	SiCl4 post valve closed
3/25/2010	3:55:24 PM	Main Vac valve closed
3/25/2010	3:55:24 PM	Bypass valve closed
3/25/2010	3:55:24 PM	Bubbler valve closed
3/25/2010	3:55:24 PM	Helium MFC set to  0.000000
3/25/2010	3:55:24 PM	H2 MFC set to  0.000000
3/25/2010	3:55:24 PM	BCl3 MFC set to  0.000000
3/25/2010	3:55:24 PM	SiCl4 MFC set to  0.000000
3/25/2010	3:55:24 PM	Bypass solenoid MFC set to  0.000000
3/25/2010	3:55:24 PM	Tube furnace set to 0
3/25/2010	3:55:24 PM	Run finished at 3:55 PM
3/25/2010	4:07:22 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/25/2010	4:07:22 PM	Recipe started at 4:07 PM
3/25/2010	4:07:22 PM	Helium valve closed
3/25/2010	4:07:22 PM	H2 valve closed
3/25/2010	4:07:22 PM	BCl3 valve closed
3/25/2010	4:07:22 PM	PH3 valve closed
3/25/2010	4:07:22 PM	SiCl4 pre valve closed
3/25/2010	4:07:22 PM	SiCl4 post valve closed
3/25/2010	4:07:22 PM	Main Vac valve closed
3/25/2010	4:07:22 PM	Bubbler valve closed
3/25/2010	4:07:22 PM	Bypass valve opened
3/25/2010	4:07:22 PM	Helium MFC set to  0.000000
3/25/2010	4:07:22 PM	H2 MFC set to  0.000000
3/25/2010	4:07:22 PM	BCl3 MFC set to  0.000000
3/25/2010	4:07:22 PM	SiCl4 MFC set to  0.000000
3/25/2010	4:07:22 PM	Bypass solenoid MFC set to  0.000000
3/25/2010	4:07:22 PM	Tube furnace set to 0
3/25/2010	4:07:54 PM	Helium valve closed
3/25/2010	4:07:54 PM	H2 valve closed
3/25/2010	4:07:54 PM	BCl3 valve closed
3/25/2010	4:07:54 PM	PH3 valve closed
3/25/2010	4:07:54 PM	SiCl4 pre valve closed
3/25/2010	4:07:54 PM	SiCl4 post valve closed
3/25/2010	4:07:54 PM	Bubbler valve closed
3/25/2010	4:07:54 PM	Main Vac valve opened
3/25/2010	4:07:54 PM	Bypass valve opened
3/25/2010	4:07:54 PM	Helium MFC set to  0.000000
3/25/2010	4:07:54 PM	H2 MFC set to  0.000000
3/25/2010	4:07:54 PM	BCl3 MFC set to  0.000000
3/25/2010	4:07:54 PM	SiCl4 MFC set to  0.000000
3/25/2010	4:07:54 PM	Bypass solenoid MFC set to  0.000000
3/25/2010	4:07:54 PM	Tube furnace set to 0
3/25/2010	4:07:55 PM	Run finished at 4:07 PM
3/25/2010	4:07:55 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/25/2010	4:08:33 PM	Main Vac valve closed
3/25/2010	4:08:34 PM	Bypass valve closed
3/25/2010	4:08:41 PM	Bypass valve opened
3/25/2010	4:08:42 PM	Main Vac valve opened
3/25/2010	4:08:45 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/25/2010	4:08:51 PM	Recipe started at 4:08 PM
3/25/2010	4:08:51 PM	H2 valve closed
3/25/2010	4:08:51 PM	BCl3 valve closed
3/25/2010	4:08:51 PM	PH3 valve closed
3/25/2010	4:08:51 PM	SiCl4 pre valve closed
3/25/2010	4:08:51 PM	SiCl4 post valve closed
3/25/2010	4:08:51 PM	Main Vac valve closed
3/25/2010	4:08:51 PM	Bypass valve closed
3/25/2010	4:08:51 PM	Bubbler valve closed
3/25/2010	4:08:51 PM	Helium valve opened
3/25/2010	4:08:51 PM	Helium MFC set to  500.000000
3/25/2010	4:08:51 PM	H2 MFC set to  0.000000
3/25/2010	4:08:51 PM	BCl3 MFC set to  0.000000
3/25/2010	4:08:51 PM	SiCl4 MFC set to  0.000000
3/25/2010	4:08:51 PM	Bypass solenoid MFC set to  0.000000
3/25/2010	4:08:51 PM	Tube furnace set to 0
3/25/2010	4:10:11 PM	Helium valve closed
3/25/2010	4:10:11 PM	H2 valve closed
3/25/2010	4:10:11 PM	BCl3 valve closed
3/25/2010	4:10:11 PM	PH3 valve closed
3/25/2010	4:10:11 PM	SiCl4 pre valve closed
3/25/2010	4:10:11 PM	SiCl4 post valve closed
3/25/2010	4:10:11 PM	Main Vac valve closed
3/25/2010	4:10:11 PM	Bypass valve closed
3/25/2010	4:10:11 PM	Bubbler valve closed
3/25/2010	4:10:11 PM	Helium MFC set to  0.000000
3/25/2010	4:10:11 PM	H2 MFC set to  0.000000
3/25/2010	4:10:11 PM	BCl3 MFC set to  0.000000
3/25/2010	4:10:11 PM	SiCl4 MFC set to  0.000000
3/25/2010	4:10:11 PM	Bypass solenoid MFC set to  0.000000
3/25/2010	4:10:11 PM	Tube furnace set to 0
3/25/2010	4:10:26 PM	Helium valve closed
3/25/2010	4:10:26 PM	H2 valve closed
3/25/2010	4:10:26 PM	BCl3 valve closed
3/25/2010	4:10:26 PM	PH3 valve closed
3/25/2010	4:10:26 PM	SiCl4 pre valve closed
3/25/2010	4:10:26 PM	SiCl4 post valve closed
3/25/2010	4:10:26 PM	Main Vac valve closed
3/25/2010	4:10:26 PM	Bubbler valve closed
3/25/2010	4:10:26 PM	Bypass valve opened
3/25/2010	4:10:26 PM	Helium MFC set to  0.000000
3/25/2010	4:10:26 PM	H2 MFC set to  0.000000
3/25/2010	4:10:26 PM	BCl3 MFC set to  0.000000
3/25/2010	4:10:26 PM	SiCl4 MFC set to  0.000000
3/25/2010	4:10:26 PM	Bypass solenoid MFC set to  0.000000
3/25/2010	4:10:26 PM	Tube furnace set to 0
3/25/2010	4:10:49 PM	Helium valve closed
3/25/2010	4:10:49 PM	H2 valve closed
3/25/2010	4:10:49 PM	BCl3 valve closed
3/25/2010	4:10:49 PM	PH3 valve closed
3/25/2010	4:10:49 PM	SiCl4 pre valve closed
3/25/2010	4:10:49 PM	SiCl4 post valve closed
3/25/2010	4:10:49 PM	Bubbler valve closed
3/25/2010	4:10:49 PM	Main Vac valve opened
3/25/2010	4:10:49 PM	Bypass valve opened
3/25/2010	4:10:49 PM	Helium MFC set to  0.000000
3/25/2010	4:10:49 PM	H2 MFC set to  0.000000
3/25/2010	4:10:49 PM	BCl3 MFC set to  0.000000
3/25/2010	4:10:49 PM	SiCl4 MFC set to  0.000000
3/25/2010	4:10:49 PM	Bypass solenoid MFC set to  0.000000
3/25/2010	4:10:49 PM	Tube furnace set to 0
3/25/2010	4:15:49 PM	H2 valve closed
3/25/2010	4:15:49 PM	BCl3 valve closed
3/25/2010	4:15:49 PM	PH3 valve closed
3/25/2010	4:15:49 PM	SiCl4 pre valve closed
3/25/2010	4:15:49 PM	SiCl4 post valve closed
3/25/2010	4:15:49 PM	Main Vac valve closed
3/25/2010	4:15:49 PM	Bypass valve closed
3/25/2010	4:15:49 PM	Bubbler valve closed
3/25/2010	4:15:49 PM	Helium valve opened
3/25/2010	4:15:49 PM	Helium MFC set to  500.000000
3/25/2010	4:15:49 PM	H2 MFC set to  0.000000
3/25/2010	4:15:49 PM	BCl3 MFC set to  0.000000
3/25/2010	4:15:49 PM	SiCl4 MFC set to  0.000000
3/25/2010	4:15:49 PM	Bypass solenoid MFC set to  0.000000
3/25/2010	4:15:49 PM	Tube furnace set to 0
3/25/2010	4:17:10 PM	Helium valve closed
3/25/2010	4:17:10 PM	H2 valve closed
3/25/2010	4:17:10 PM	BCl3 valve closed
3/25/2010	4:17:10 PM	PH3 valve closed
3/25/2010	4:17:10 PM	SiCl4 pre valve closed
3/25/2010	4:17:10 PM	SiCl4 post valve closed
3/25/2010	4:17:10 PM	Main Vac valve closed
3/25/2010	4:17:10 PM	Bypass valve closed
3/25/2010	4:17:10 PM	Bubbler valve closed
3/25/2010	4:17:10 PM	Helium MFC set to  0.000000
3/25/2010	4:17:10 PM	H2 MFC set to  0.000000
3/25/2010	4:17:10 PM	BCl3 MFC set to  0.000000
3/25/2010	4:17:10 PM	SiCl4 MFC set to  0.000000
3/25/2010	4:17:10 PM	Bypass solenoid MFC set to  0.000000
3/25/2010	4:17:10 PM	Tube furnace set to 0
3/25/2010	4:17:25 PM	Helium valve closed
3/25/2010	4:17:25 PM	H2 valve closed
3/25/2010	4:17:25 PM	BCl3 valve closed
3/25/2010	4:17:25 PM	PH3 valve closed
3/25/2010	4:17:25 PM	SiCl4 pre valve closed
3/25/2010	4:17:25 PM	SiCl4 post valve closed
3/25/2010	4:17:25 PM	Main Vac valve closed
3/25/2010	4:17:25 PM	Bubbler valve closed
3/25/2010	4:17:25 PM	Bypass valve opened
3/25/2010	4:17:25 PM	Helium MFC set to  0.000000
3/25/2010	4:17:25 PM	H2 MFC set to  0.000000
3/25/2010	4:17:25 PM	BCl3 MFC set to  0.000000
3/25/2010	4:17:25 PM	SiCl4 MFC set to  0.000000
3/25/2010	4:17:25 PM	Bypass solenoid MFC set to  0.000000
3/25/2010	4:17:25 PM	Tube furnace set to 0
3/25/2010	4:17:48 PM	Helium valve closed
3/25/2010	4:17:48 PM	H2 valve closed
3/25/2010	4:17:48 PM	BCl3 valve closed
3/25/2010	4:17:48 PM	PH3 valve closed
3/25/2010	4:17:48 PM	SiCl4 pre valve closed
3/25/2010	4:17:48 PM	SiCl4 post valve closed
3/25/2010	4:17:48 PM	Bubbler valve closed
3/25/2010	4:17:48 PM	Main Vac valve opened
3/25/2010	4:17:48 PM	Bypass valve opened
3/25/2010	4:17:48 PM	Helium MFC set to  0.000000
3/25/2010	4:17:48 PM	H2 MFC set to  0.000000
3/25/2010	4:17:48 PM	BCl3 MFC set to  0.000000
3/25/2010	4:17:48 PM	SiCl4 MFC set to  0.000000
3/25/2010	4:17:48 PM	Bypass solenoid MFC set to  0.000000
3/25/2010	4:17:48 PM	Tube furnace set to 0
3/25/2010	4:22:48 PM	H2 valve closed
3/25/2010	4:22:48 PM	BCl3 valve closed
3/25/2010	4:22:48 PM	PH3 valve closed
3/25/2010	4:22:48 PM	SiCl4 pre valve closed
3/25/2010	4:22:48 PM	SiCl4 post valve closed
3/25/2010	4:22:48 PM	Main Vac valve closed
3/25/2010	4:22:48 PM	Bypass valve closed
3/25/2010	4:22:48 PM	Bubbler valve closed
3/25/2010	4:22:48 PM	Helium valve opened
3/25/2010	4:22:48 PM	Helium MFC set to  500.000000
3/25/2010	4:22:48 PM	H2 MFC set to  0.000000
3/25/2010	4:22:48 PM	BCl3 MFC set to  0.000000
3/25/2010	4:22:48 PM	SiCl4 MFC set to  0.000000
3/25/2010	4:22:48 PM	Bypass solenoid MFC set to  0.000000
3/25/2010	4:22:48 PM	Tube furnace set to 0
3/25/2010	4:24:09 PM	Helium valve closed
3/25/2010	4:24:09 PM	H2 valve closed
3/25/2010	4:24:09 PM	BCl3 valve closed
3/25/2010	4:24:09 PM	PH3 valve closed
3/25/2010	4:24:09 PM	SiCl4 pre valve closed
3/25/2010	4:24:09 PM	SiCl4 post valve closed
3/25/2010	4:24:09 PM	Main Vac valve closed
3/25/2010	4:24:09 PM	Bypass valve closed
3/25/2010	4:24:09 PM	Bubbler valve closed
3/25/2010	4:24:09 PM	Helium MFC set to  0.000000
3/25/2010	4:24:09 PM	H2 MFC set to  0.000000
3/25/2010	4:24:09 PM	BCl3 MFC set to  0.000000
3/25/2010	4:24:09 PM	SiCl4 MFC set to  0.000000
3/25/2010	4:24:09 PM	Bypass solenoid MFC set to  0.000000
3/25/2010	4:24:09 PM	Tube furnace set to 0
3/25/2010	4:24:24 PM	Helium valve closed
3/25/2010	4:24:24 PM	H2 valve closed
3/25/2010	4:24:24 PM	BCl3 valve closed
3/25/2010	4:24:24 PM	PH3 valve closed
3/25/2010	4:24:24 PM	SiCl4 pre valve closed
3/25/2010	4:24:24 PM	SiCl4 post valve closed
3/25/2010	4:24:24 PM	Main Vac valve closed
3/25/2010	4:24:24 PM	Bubbler valve closed
3/25/2010	4:24:24 PM	Bypass valve opened
3/25/2010	4:24:24 PM	Helium MFC set to  0.000000
3/25/2010	4:24:24 PM	H2 MFC set to  0.000000
3/25/2010	4:24:24 PM	BCl3 MFC set to  0.000000
3/25/2010	4:24:24 PM	SiCl4 MFC set to  0.000000
3/25/2010	4:24:24 PM	Bypass solenoid MFC set to  0.000000
3/25/2010	4:24:24 PM	Tube furnace set to 0
3/25/2010	4:24:47 PM	Helium valve closed
3/25/2010	4:24:47 PM	H2 valve closed
3/25/2010	4:24:47 PM	BCl3 valve closed
3/25/2010	4:24:47 PM	PH3 valve closed
3/25/2010	4:24:47 PM	SiCl4 pre valve closed
3/25/2010	4:24:47 PM	SiCl4 post valve closed
3/25/2010	4:24:47 PM	Bubbler valve closed
3/25/2010	4:24:47 PM	Main Vac valve opened
3/25/2010	4:24:47 PM	Bypass valve opened
3/25/2010	4:24:47 PM	Helium MFC set to  0.000000
3/25/2010	4:24:47 PM	H2 MFC set to  0.000000
3/25/2010	4:24:47 PM	BCl3 MFC set to  0.000000
3/25/2010	4:24:47 PM	SiCl4 MFC set to  0.000000
3/25/2010	4:24:47 PM	Bypass solenoid MFC set to  0.000000
3/25/2010	4:24:47 PM	Tube furnace set to 0
3/25/2010	4:29:47 PM	Helium valve closed
3/25/2010	4:29:47 PM	H2 valve closed
3/25/2010	4:29:47 PM	BCl3 valve closed
3/25/2010	4:29:47 PM	PH3 valve closed
3/25/2010	4:29:47 PM	SiCl4 pre valve closed
3/25/2010	4:29:47 PM	SiCl4 post valve closed
3/25/2010	4:29:47 PM	Bubbler valve closed
3/25/2010	4:29:47 PM	Main Vac valve opened
3/25/2010	4:29:47 PM	Bypass valve opened
3/25/2010	4:29:47 PM	Helium MFC set to  0.000000
3/25/2010	4:29:47 PM	H2 MFC set to  0.000000
3/25/2010	4:29:47 PM	BCl3 MFC set to  0.000000
3/25/2010	4:29:47 PM	SiCl4 MFC set to  0.000000
3/25/2010	4:29:47 PM	Bypass solenoid MFC set to  0.000000
3/25/2010	4:29:47 PM	Tube furnace set to 0
3/25/2010	4:29:49 PM	Run finished at 4:29 PM
3/25/2010	4:29:49 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/25/2010	5:02:12 PM	Bypass valve closed
3/25/2010	5:02:12 PM	Main Vac valve closed
3/25/2010	5:02:21 PM	Bypass valve opened
3/25/2010	5:02:22 PM	Main Vac valve opened
3/25/2010	5:02:52 PM	Recipe started at 5:02 PM
3/25/2010	5:02:52 PM	Helium valve closed
3/25/2010	5:02:52 PM	BCl3 valve closed
3/25/2010	5:02:52 PM	PH3 valve closed
3/25/2010	5:02:52 PM	SiCl4 pre valve closed
3/25/2010	5:02:52 PM	SiCl4 post valve closed
3/25/2010	5:02:52 PM	Main Vac valve closed
3/25/2010	5:02:52 PM	Bypass valve closed
3/25/2010	5:02:52 PM	Bubbler valve closed
3/25/2010	5:02:52 PM	H2 valve opened
3/25/2010	5:02:52 PM	Helium MFC set to  0.000000
3/25/2010	5:02:52 PM	H2 MFC set to  500.000000
3/25/2010	5:02:52 PM	BCl3 MFC set to  0.000000
3/25/2010	5:02:52 PM	SiCl4 MFC set to  0.000000
3/25/2010	5:02:52 PM	Bypass solenoid MFC set to  0.000000
3/25/2010	5:02:52 PM	Tube furnace set to 0
3/25/2010	5:04:13 PM	Helium valve closed
3/25/2010	5:04:13 PM	BCl3 valve closed
3/25/2010	5:04:13 PM	PH3 valve closed
3/25/2010	5:04:13 PM	SiCl4 pre valve closed
3/25/2010	5:04:13 PM	SiCl4 post valve closed
3/25/2010	5:04:13 PM	Main Vac valve closed
3/25/2010	5:04:13 PM	Bypass valve closed
3/25/2010	5:04:13 PM	H2 valve opened
3/25/2010	5:04:13 PM	Bubbler valve opened
3/25/2010	5:04:13 PM	Helium MFC set to  0.000000
3/25/2010	5:04:13 PM	H2 MFC set to  500.000000
3/25/2010	5:04:13 PM	BCl3 MFC set to  0.000000
3/25/2010	5:04:13 PM	SiCl4 MFC set to  0.000000
3/25/2010	5:04:13 PM	Bypass solenoid MFC set to  0.000000
3/25/2010	5:04:13 PM	Tube furnace set to 0
3/25/2010	5:24:13 PM	Helium valve closed
3/25/2010	5:24:13 PM	PH3 valve closed
3/25/2010	5:24:13 PM	Main Vac valve closed
3/25/2010	5:24:13 PM	Bypass valve closed
3/25/2010	5:24:13 PM	H2 valve opened
3/25/2010	5:24:13 PM	BCl3 valve opened
3/25/2010	5:24:13 PM	SiCl4 pre valve opened
3/25/2010	5:24:13 PM	SiCl4 post valve opened
3/25/2010	5:24:13 PM	Bubbler valve opened
3/25/2010	5:24:13 PM	Helium MFC set to  0.000000
3/25/2010	5:24:13 PM	H2 MFC set to  500.000000
3/25/2010	5:24:13 PM	BCl3 MFC set to  35.000000
3/25/2010	5:24:13 PM	SiCl4 MFC set to  325.000000
3/25/2010	5:24:13 PM	Bypass solenoid MFC set to  0.000000
3/25/2010	5:24:13 PM	Tube furnace set to 0
3/25/2010	5:44:14 PM	H2 valve closed
3/25/2010	5:44:14 PM	BCl3 valve closed
3/25/2010	5:44:14 PM	PH3 valve closed
3/25/2010	5:44:14 PM	SiCl4 pre valve closed
3/25/2010	5:44:14 PM	SiCl4 post valve closed
3/25/2010	5:44:14 PM	Main Vac valve closed
3/25/2010	5:44:14 PM	Bypass valve closed
3/25/2010	5:44:14 PM	Helium valve opened
3/25/2010	5:44:14 PM	Bubbler valve opened
3/25/2010	5:44:14 PM	Helium MFC set to  500.000000
3/25/2010	5:44:14 PM	H2 MFC set to  0.000000
3/25/2010	5:44:14 PM	BCl3 MFC set to  0.000000
3/25/2010	5:44:14 PM	SiCl4 MFC set to  0.000000
3/25/2010	5:44:14 PM	Bypass solenoid MFC set to  0.000000
3/25/2010	5:44:14 PM	Tube furnace set to 0
3/25/2010	6:04:14 PM	Helium valve closed
3/25/2010	6:04:14 PM	H2 valve closed
3/25/2010	6:04:14 PM	BCl3 valve closed
3/25/2010	6:04:14 PM	PH3 valve closed
3/25/2010	6:04:14 PM	SiCl4 pre valve closed
3/25/2010	6:04:14 PM	SiCl4 post valve closed
3/25/2010	6:04:14 PM	Main Vac valve closed
3/25/2010	6:04:14 PM	Bypass valve closed
3/25/2010	6:04:14 PM	Bubbler valve closed
3/25/2010	6:04:14 PM	Helium MFC set to  0.000000
3/25/2010	6:04:14 PM	H2 MFC set to  0.000000
3/25/2010	6:04:14 PM	BCl3 MFC set to  0.000000
3/25/2010	6:04:14 PM	SiCl4 MFC set to  0.000000
3/25/2010	6:04:14 PM	Bypass solenoid MFC set to  0.000000
3/25/2010	6:04:14 PM	Tube furnace set to 0
3/25/2010	6:04:14 PM	Run finished at 6:04 PM
3/25/2010	6:36:27 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/25/2010	6:36:28 PM	Recipe started at 6:36 PM
3/25/2010	6:36:28 PM	Helium valve closed
3/25/2010	6:36:28 PM	H2 valve closed
3/25/2010	6:36:28 PM	BCl3 valve closed
3/25/2010	6:36:28 PM	PH3 valve closed
3/25/2010	6:36:28 PM	SiCl4 pre valve closed
3/25/2010	6:36:28 PM	SiCl4 post valve closed
3/25/2010	6:36:28 PM	Main Vac valve closed
3/25/2010	6:36:28 PM	Bubbler valve closed
3/25/2010	6:36:28 PM	Bypass valve opened
3/25/2010	6:36:28 PM	Helium MFC set to  0.000000
3/25/2010	6:36:28 PM	H2 MFC set to  0.000000
3/25/2010	6:36:28 PM	BCl3 MFC set to  0.000000
3/25/2010	6:36:28 PM	SiCl4 MFC set to  0.000000
3/25/2010	6:36:28 PM	Bypass solenoid MFC set to  0.000000
3/25/2010	6:36:28 PM	Tube furnace set to 0
3/25/2010	6:37:01 PM	Helium valve closed
3/25/2010	6:37:01 PM	H2 valve closed
3/25/2010	6:37:01 PM	BCl3 valve closed
3/25/2010	6:37:01 PM	PH3 valve closed
3/25/2010	6:37:01 PM	SiCl4 pre valve closed
3/25/2010	6:37:01 PM	SiCl4 post valve closed
3/25/2010	6:37:01 PM	Bubbler valve closed
3/25/2010	6:37:01 PM	Main Vac valve opened
3/25/2010	6:37:01 PM	Bypass valve opened
3/25/2010	6:37:01 PM	Helium MFC set to  0.000000
3/25/2010	6:37:01 PM	H2 MFC set to  0.000000
3/25/2010	6:37:01 PM	BCl3 MFC set to  0.000000
3/25/2010	6:37:01 PM	SiCl4 MFC set to  0.000000
3/25/2010	6:37:01 PM	Bypass solenoid MFC set to  0.000000
3/25/2010	6:37:01 PM	Tube furnace set to 0
3/25/2010	6:37:01 PM	Run finished at 6:37 PM
3/25/2010	6:37:01 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/25/2010	6:37:57 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/25/2010	6:38:03 PM	Recipe started at 6:38 PM
3/25/2010	6:38:03 PM	H2 valve closed
3/25/2010	6:38:03 PM	BCl3 valve closed
3/25/2010	6:38:03 PM	PH3 valve closed
3/25/2010	6:38:03 PM	SiCl4 pre valve closed
3/25/2010	6:38:03 PM	SiCl4 post valve closed
3/25/2010	6:38:03 PM	Main Vac valve closed
3/25/2010	6:38:03 PM	Bypass valve closed
3/25/2010	6:38:03 PM	Bubbler valve closed
3/25/2010	6:38:03 PM	Helium valve opened
3/25/2010	6:38:03 PM	Helium MFC set to  500.000000
3/25/2010	6:38:03 PM	H2 MFC set to  0.000000
3/25/2010	6:38:03 PM	BCl3 MFC set to  0.000000
3/25/2010	6:38:03 PM	SiCl4 MFC set to  0.000000
3/25/2010	6:38:03 PM	Bypass solenoid MFC set to  0.000000
3/25/2010	6:38:03 PM	Tube furnace set to 0
3/25/2010	6:39:24 PM	Helium valve closed
3/25/2010	6:39:24 PM	H2 valve closed
3/25/2010	6:39:24 PM	BCl3 valve closed
3/25/2010	6:39:24 PM	PH3 valve closed
3/25/2010	6:39:24 PM	SiCl4 pre valve closed
3/25/2010	6:39:24 PM	SiCl4 post valve closed
3/25/2010	6:39:24 PM	Main Vac valve closed
3/25/2010	6:39:24 PM	Bypass valve closed
3/25/2010	6:39:24 PM	Bubbler valve closed
3/25/2010	6:39:24 PM	Helium MFC set to  0.000000
3/25/2010	6:39:24 PM	H2 MFC set to  0.000000
3/25/2010	6:39:24 PM	BCl3 MFC set to  0.000000
3/25/2010	6:39:24 PM	SiCl4 MFC set to  0.000000
3/25/2010	6:39:24 PM	Bypass solenoid MFC set to  0.000000
3/25/2010	6:39:24 PM	Tube furnace set to 0
3/25/2010	6:39:39 PM	Helium valve closed
3/25/2010	6:39:39 PM	H2 valve closed
3/25/2010	6:39:39 PM	BCl3 valve closed
3/25/2010	6:39:39 PM	PH3 valve closed
3/25/2010	6:39:39 PM	SiCl4 pre valve closed
3/25/2010	6:39:39 PM	SiCl4 post valve closed
3/25/2010	6:39:39 PM	Main Vac valve closed
3/25/2010	6:39:39 PM	Bubbler valve closed
3/25/2010	6:39:39 PM	Bypass valve opened
3/25/2010	6:39:39 PM	Helium MFC set to  0.000000
3/25/2010	6:39:39 PM	H2 MFC set to  0.000000
3/25/2010	6:39:39 PM	BCl3 MFC set to  0.000000
3/25/2010	6:39:39 PM	SiCl4 MFC set to  0.000000
3/25/2010	6:39:39 PM	Bypass solenoid MFC set to  0.000000
3/25/2010	6:39:39 PM	Tube furnace set to 0
3/25/2010	6:40:02 PM	Helium valve closed
3/25/2010	6:40:02 PM	H2 valve closed
3/25/2010	6:40:02 PM	BCl3 valve closed
3/25/2010	6:40:02 PM	PH3 valve closed
3/25/2010	6:40:02 PM	SiCl4 pre valve closed
3/25/2010	6:40:02 PM	SiCl4 post valve closed
3/25/2010	6:40:02 PM	Bubbler valve closed
3/25/2010	6:40:02 PM	Main Vac valve opened
3/25/2010	6:40:02 PM	Bypass valve opened
3/25/2010	6:40:02 PM	Helium MFC set to  0.000000
3/25/2010	6:40:02 PM	H2 MFC set to  0.000000
3/25/2010	6:40:02 PM	BCl3 MFC set to  0.000000
3/25/2010	6:40:02 PM	SiCl4 MFC set to  0.000000
3/25/2010	6:40:02 PM	Bypass solenoid MFC set to  0.000000
3/25/2010	6:40:02 PM	Tube furnace set to 0
3/25/2010	6:45:03 PM	H2 valve closed
3/25/2010	6:45:03 PM	BCl3 valve closed
3/25/2010	6:45:03 PM	PH3 valve closed
3/25/2010	6:45:03 PM	SiCl4 pre valve closed
3/25/2010	6:45:03 PM	SiCl4 post valve closed
3/25/2010	6:45:03 PM	Main Vac valve closed
3/25/2010	6:45:03 PM	Bypass valve closed
3/25/2010	6:45:03 PM	Bubbler valve closed
3/25/2010	6:45:03 PM	Helium valve opened
3/25/2010	6:45:03 PM	Helium MFC set to  500.000000
3/25/2010	6:45:03 PM	H2 MFC set to  0.000000
3/25/2010	6:45:03 PM	BCl3 MFC set to  0.000000
3/25/2010	6:45:03 PM	SiCl4 MFC set to  0.000000
3/25/2010	6:45:03 PM	Bypass solenoid MFC set to  0.000000
3/25/2010	6:45:03 PM	Tube furnace set to 0
3/25/2010	6:46:24 PM	Helium valve closed
3/25/2010	6:46:24 PM	H2 valve closed
3/25/2010	6:46:24 PM	BCl3 valve closed
3/25/2010	6:46:24 PM	PH3 valve closed
3/25/2010	6:46:24 PM	SiCl4 pre valve closed
3/25/2010	6:46:24 PM	SiCl4 post valve closed
3/25/2010	6:46:24 PM	Main Vac valve closed
3/25/2010	6:46:24 PM	Bypass valve closed
3/25/2010	6:46:24 PM	Bubbler valve closed
3/25/2010	6:46:24 PM	Helium MFC set to  0.000000
3/25/2010	6:46:24 PM	H2 MFC set to  0.000000
3/25/2010	6:46:24 PM	BCl3 MFC set to  0.000000
3/25/2010	6:46:24 PM	SiCl4 MFC set to  0.000000
3/25/2010	6:46:24 PM	Bypass solenoid MFC set to  0.000000
3/25/2010	6:46:24 PM	Tube furnace set to 0
3/25/2010	6:46:39 PM	Helium valve closed
3/25/2010	6:46:39 PM	H2 valve closed
3/25/2010	6:46:39 PM	BCl3 valve closed
3/25/2010	6:46:39 PM	PH3 valve closed
3/25/2010	6:46:39 PM	SiCl4 pre valve closed
3/25/2010	6:46:39 PM	SiCl4 post valve closed
3/25/2010	6:46:39 PM	Main Vac valve closed
3/25/2010	6:46:39 PM	Bubbler valve closed
3/25/2010	6:46:39 PM	Bypass valve opened
3/25/2010	6:46:39 PM	Helium MFC set to  0.000000
3/25/2010	6:46:39 PM	H2 MFC set to  0.000000
3/25/2010	6:46:39 PM	BCl3 MFC set to  0.000000
3/25/2010	6:46:39 PM	SiCl4 MFC set to  0.000000
3/25/2010	6:46:39 PM	Bypass solenoid MFC set to  0.000000
3/25/2010	6:46:39 PM	Tube furnace set to 0
3/25/2010	6:47:02 PM	Helium valve closed
3/25/2010	6:47:02 PM	H2 valve closed
3/25/2010	6:47:02 PM	BCl3 valve closed
3/25/2010	6:47:02 PM	PH3 valve closed
3/25/2010	6:47:02 PM	SiCl4 pre valve closed
3/25/2010	6:47:02 PM	SiCl4 post valve closed
3/25/2010	6:47:02 PM	Bubbler valve closed
3/25/2010	6:47:02 PM	Main Vac valve opened
3/25/2010	6:47:02 PM	Bypass valve opened
3/25/2010	6:47:02 PM	Helium MFC set to  0.000000
3/25/2010	6:47:02 PM	H2 MFC set to  0.000000
3/25/2010	6:47:02 PM	BCl3 MFC set to  0.000000
3/25/2010	6:47:02 PM	SiCl4 MFC set to  0.000000
3/25/2010	6:47:02 PM	Bypass solenoid MFC set to  0.000000
3/25/2010	6:47:02 PM	Tube furnace set to 0
3/25/2010	6:52:02 PM	H2 valve closed
3/25/2010	6:52:02 PM	BCl3 valve closed
3/25/2010	6:52:02 PM	PH3 valve closed
3/25/2010	6:52:02 PM	SiCl4 pre valve closed
3/25/2010	6:52:02 PM	SiCl4 post valve closed
3/25/2010	6:52:02 PM	Main Vac valve closed
3/25/2010	6:52:02 PM	Bypass valve closed
3/25/2010	6:52:02 PM	Bubbler valve closed
3/25/2010	6:52:02 PM	Helium valve opened
3/25/2010	6:52:02 PM	Helium MFC set to  500.000000
3/25/2010	6:52:02 PM	H2 MFC set to  0.000000
3/25/2010	6:52:02 PM	BCl3 MFC set to  0.000000
3/25/2010	6:52:02 PM	SiCl4 MFC set to  0.000000
3/25/2010	6:52:02 PM	Bypass solenoid MFC set to  0.000000
3/25/2010	6:52:02 PM	Tube furnace set to 0
3/25/2010	6:53:23 PM	Helium valve closed
3/25/2010	6:53:23 PM	H2 valve closed
3/25/2010	6:53:23 PM	BCl3 valve closed
3/25/2010	6:53:23 PM	PH3 valve closed
3/25/2010	6:53:23 PM	SiCl4 pre valve closed
3/25/2010	6:53:23 PM	SiCl4 post valve closed
3/25/2010	6:53:23 PM	Main Vac valve closed
3/25/2010	6:53:23 PM	Bypass valve closed
3/25/2010	6:53:23 PM	Bubbler valve closed
3/25/2010	6:53:23 PM	Helium MFC set to  0.000000
3/25/2010	6:53:23 PM	H2 MFC set to  0.000000
3/25/2010	6:53:23 PM	BCl3 MFC set to  0.000000
3/25/2010	6:53:24 PM	SiCl4 MFC set to  0.000000
3/25/2010	6:53:24 PM	Bypass solenoid MFC set to  0.000000
3/25/2010	6:53:24 PM	Tube furnace set to 0
3/25/2010	6:53:39 PM	Helium valve closed
3/25/2010	6:53:39 PM	H2 valve closed
3/25/2010	6:53:39 PM	BCl3 valve closed
3/25/2010	6:53:39 PM	PH3 valve closed
3/25/2010	6:53:39 PM	SiCl4 pre valve closed
3/25/2010	6:53:39 PM	SiCl4 post valve closed
3/25/2010	6:53:39 PM	Main Vac valve closed
3/25/2010	6:53:39 PM	Bubbler valve closed
3/25/2010	6:53:39 PM	Bypass valve opened
3/25/2010	6:53:39 PM	Helium MFC set to  0.000000
3/25/2010	6:53:39 PM	H2 MFC set to  0.000000
3/25/2010	6:53:39 PM	BCl3 MFC set to  0.000000
3/25/2010	6:53:39 PM	SiCl4 MFC set to  0.000000
3/25/2010	6:53:39 PM	Bypass solenoid MFC set to  0.000000
3/25/2010	6:53:39 PM	Tube furnace set to 0
3/25/2010	6:54:01 PM	Helium valve closed
3/25/2010	6:54:01 PM	H2 valve closed
3/25/2010	6:54:01 PM	BCl3 valve closed
3/25/2010	6:54:01 PM	PH3 valve closed
3/25/2010	6:54:01 PM	SiCl4 pre valve closed
3/25/2010	6:54:01 PM	SiCl4 post valve closed
3/25/2010	6:54:01 PM	Bubbler valve closed
3/25/2010	6:54:01 PM	Main Vac valve opened
3/25/2010	6:54:01 PM	Bypass valve opened
3/25/2010	6:54:01 PM	Helium MFC set to  0.000000
3/25/2010	6:54:01 PM	H2 MFC set to  0.000000
3/25/2010	6:54:01 PM	BCl3 MFC set to  0.000000
3/25/2010	6:54:01 PM	SiCl4 MFC set to  0.000000
3/25/2010	6:54:01 PM	Bypass solenoid MFC set to  0.000000
3/25/2010	6:54:01 PM	Tube furnace set to 0
3/25/2010	6:59:02 PM	Helium valve closed
3/25/2010	6:59:02 PM	H2 valve closed
3/25/2010	6:59:02 PM	BCl3 valve closed
3/25/2010	6:59:02 PM	PH3 valve closed
3/25/2010	6:59:02 PM	SiCl4 pre valve closed
3/25/2010	6:59:02 PM	SiCl4 post valve closed
3/25/2010	6:59:02 PM	Bubbler valve closed
3/25/2010	6:59:02 PM	Main Vac valve opened
3/25/2010	6:59:02 PM	Bypass valve opened
3/25/2010	6:59:02 PM	Helium MFC set to  0.000000
3/25/2010	6:59:02 PM	H2 MFC set to  0.000000
3/25/2010	6:59:02 PM	BCl3 MFC set to  0.000000
3/25/2010	6:59:02 PM	SiCl4 MFC set to  0.000000
3/25/2010	6:59:02 PM	Bypass solenoid MFC set to  0.000000
3/25/2010	6:59:02 PM	Tube furnace set to 0
3/25/2010	6:59:03 PM	Run finished at 6:59 PM
3/25/2010	6:59:03 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/25/2010	6:59:37 PM	Bypass valve closed
3/25/2010	6:59:38 PM	Main Vac valve closed
3/25/2010	6:59:55 PM	Bypass valve opened
3/25/2010	6:59:55 PM	Main Vac valve opened
3/25/2010	7:12:39 PM	Recipe started at 7:12 PM
3/25/2010	7:12:39 PM	Helium valve closed
3/25/2010	7:12:39 PM	BCl3 valve closed
3/25/2010	7:12:39 PM	PH3 valve closed
3/25/2010	7:12:39 PM	SiCl4 pre valve closed
3/25/2010	7:12:39 PM	SiCl4 post valve closed
3/25/2010	7:12:39 PM	Main Vac valve closed
3/25/2010	7:12:39 PM	Bypass valve closed
3/25/2010	7:12:39 PM	Bubbler valve closed
3/25/2010	7:12:39 PM	H2 valve opened
3/25/2010	7:12:39 PM	Helium MFC set to  0.000000
3/25/2010	7:12:39 PM	H2 MFC set to  500.000000
3/25/2010	7:12:39 PM	BCl3 MFC set to  0.000000
3/25/2010	7:12:39 PM	SiCl4 MFC set to  0.000000
3/25/2010	7:12:39 PM	Bypass solenoid MFC set to  0.000000
3/25/2010	7:12:39 PM	Tube furnace set to 0
3/25/2010	7:14:02 PM	Helium valve closed
3/25/2010	7:14:02 PM	BCl3 valve closed
3/25/2010	7:14:02 PM	PH3 valve closed
3/25/2010	7:14:02 PM	SiCl4 pre valve closed
3/25/2010	7:14:02 PM	SiCl4 post valve closed
3/25/2010	7:14:02 PM	Main Vac valve closed
3/25/2010	7:14:02 PM	Bypass valve closed
3/25/2010	7:14:02 PM	H2 valve opened
3/25/2010	7:14:02 PM	Bubbler valve opened
3/25/2010	7:14:02 PM	Helium MFC set to  0.000000
3/25/2010	7:14:02 PM	H2 MFC set to  500.000000
3/25/2010	7:14:02 PM	BCl3 MFC set to  0.000000
3/25/2010	7:14:02 PM	SiCl4 MFC set to  0.000000
3/25/2010	7:14:02 PM	Bypass solenoid MFC set to  0.000000
3/25/2010	7:14:02 PM	Tube furnace set to 0
3/25/2010	7:23:21 PM	Helium valve closed
3/25/2010	7:23:21 PM	PH3 valve closed
3/25/2010	7:23:21 PM	Main Vac valve closed
3/25/2010	7:23:21 PM	Bypass valve closed
3/25/2010	7:23:21 PM	H2 valve opened
3/25/2010	7:23:21 PM	BCl3 valve opened
3/25/2010	7:23:21 PM	SiCl4 pre valve opened
3/25/2010	7:23:21 PM	SiCl4 post valve opened
3/25/2010	7:23:21 PM	Bubbler valve opened
3/25/2010	7:23:21 PM	Helium MFC set to  0.000000
3/25/2010	7:23:21 PM	H2 MFC set to  500.000000
3/25/2010	7:23:21 PM	BCl3 MFC set to  35.000000
3/25/2010	7:23:21 PM	SiCl4 MFC set to  325.000000
3/25/2010	7:23:21 PM	Bypass solenoid MFC set to  0.000000
3/25/2010	7:23:21 PM	Tube furnace set to 0
3/25/2010	7:26:40 PM	Helium valve closed
3/25/2010	7:26:40 PM	PH3 valve closed
3/25/2010	7:26:40 PM	Main Vac valve closed
3/25/2010	7:26:40 PM	Bypass valve closed
3/25/2010	7:26:40 PM	H2 valve opened
3/25/2010	7:26:40 PM	BCl3 valve opened
3/25/2010	7:26:40 PM	SiCl4 pre valve opened
3/25/2010	7:26:40 PM	SiCl4 post valve opened
3/25/2010	7:26:40 PM	Bubbler valve opened
3/25/2010	7:26:40 PM	Helium MFC set to  0.000000
3/25/2010	7:26:40 PM	H2 MFC set to  500.000000
3/25/2010	7:26:40 PM	BCl3 MFC set to  35.000000
3/25/2010	7:26:40 PM	SiCl4 MFC set to  325.000000
3/25/2010	7:26:40 PM	Bypass solenoid MFC set to  0.000000
3/25/2010	7:26:40 PM	Tube furnace set to 0
3/25/2010	7:31:40 PM	H2 valve closed
3/25/2010	7:31:40 PM	BCl3 valve closed
3/25/2010	7:31:40 PM	PH3 valve closed
3/25/2010	7:31:40 PM	SiCl4 pre valve closed
3/25/2010	7:31:40 PM	SiCl4 post valve closed
3/25/2010	7:31:40 PM	Main Vac valve closed
3/25/2010	7:31:40 PM	Bypass valve closed
3/25/2010	7:31:40 PM	Helium valve opened
3/25/2010	7:31:40 PM	Bubbler valve opened
3/25/2010	7:31:40 PM	Helium MFC set to  500.000000
3/25/2010	7:31:40 PM	H2 MFC set to  0.000000
3/25/2010	7:31:40 PM	BCl3 MFC set to  0.000000
3/25/2010	7:31:40 PM	SiCl4 MFC set to  0.000000
3/25/2010	7:31:40 PM	Bypass solenoid MFC set to  0.000000
3/25/2010	7:31:40 PM	Tube furnace set to 0
3/25/2010	7:51:40 PM	Helium valve closed
3/25/2010	7:51:40 PM	H2 valve closed
3/25/2010	7:51:40 PM	BCl3 valve closed
3/25/2010	7:51:40 PM	PH3 valve closed
3/25/2010	7:51:40 PM	SiCl4 pre valve closed
3/25/2010	7:51:40 PM	SiCl4 post valve closed
3/25/2010	7:51:40 PM	Main Vac valve closed
3/25/2010	7:51:40 PM	Bypass valve closed
3/25/2010	7:51:40 PM	Bubbler valve closed
3/25/2010	7:51:40 PM	Helium MFC set to  0.000000
3/25/2010	7:51:40 PM	H2 MFC set to  0.000000
3/25/2010	7:51:40 PM	BCl3 MFC set to  0.000000
3/25/2010	7:51:40 PM	SiCl4 MFC set to  0.000000
3/25/2010	7:51:40 PM	Bypass solenoid MFC set to  0.000000
3/25/2010	7:51:40 PM	Tube furnace set to 0
3/25/2010	7:51:41 PM	Run finished at 7:51 PM
3/25/2010	8:00:42 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/25/2010	8:00:43 PM	Recipe started at 8:00 PM
3/25/2010	8:00:43 PM	Helium valve closed
3/25/2010	8:00:43 PM	H2 valve closed
3/25/2010	8:00:43 PM	BCl3 valve closed
3/25/2010	8:00:43 PM	PH3 valve closed
3/25/2010	8:00:43 PM	SiCl4 pre valve closed
3/25/2010	8:00:43 PM	SiCl4 post valve closed
3/25/2010	8:00:43 PM	Main Vac valve closed
3/25/2010	8:00:43 PM	Bubbler valve closed
3/25/2010	8:00:43 PM	Bypass valve opened
3/25/2010	8:00:43 PM	Helium MFC set to  0.000000
3/25/2010	8:00:43 PM	H2 MFC set to  0.000000
3/25/2010	8:00:43 PM	BCl3 MFC set to  0.000000
3/25/2010	8:00:43 PM	SiCl4 MFC set to  0.000000
3/25/2010	8:00:43 PM	Bypass solenoid MFC set to  0.000000
3/25/2010	8:00:43 PM	Tube furnace set to 0
3/25/2010	8:01:15 PM	Helium valve closed
3/25/2010	8:01:15 PM	H2 valve closed
3/25/2010	8:01:15 PM	BCl3 valve closed
3/25/2010	8:01:15 PM	PH3 valve closed
3/25/2010	8:01:15 PM	SiCl4 pre valve closed
3/25/2010	8:01:15 PM	SiCl4 post valve closed
3/25/2010	8:01:15 PM	Bubbler valve closed
3/25/2010	8:01:15 PM	Main Vac valve opened
3/25/2010	8:01:15 PM	Bypass valve opened
3/25/2010	8:01:15 PM	Helium MFC set to  0.000000
3/25/2010	8:01:15 PM	H2 MFC set to  0.000000
3/25/2010	8:01:15 PM	BCl3 MFC set to  0.000000
3/25/2010	8:01:15 PM	SiCl4 MFC set to  0.000000
3/25/2010	8:01:15 PM	Bypass solenoid MFC set to  0.000000
3/25/2010	8:01:15 PM	Tube furnace set to 0
3/25/2010	8:01:16 PM	Run finished at 8:01 PM
3/25/2010	8:01:16 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
